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A Transport and Reaction Model for Simulating Cluster SIMS Depth Profiles of Organic Solids Nunzio Tuccitto, Gabriella Zappalà, Stefania Vitale, Alberto Torrisi, and Antonino Licciardello J. Phys. Chem. C, Just Accepted Manuscript • DOI: 10.1021/acs.jpcc.6b01532 • Publication Date (Web): 11 Apr 2016 Downloaded from http://pubs.acs.org on April 21, 2016
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The Journal of Physical Chemistry
A Transport and Reaction Model for Simulating Cluster SIMS Depth Profiles of Organic Solids Nunzio Tuccitto,* Gabriella Zappalà, Stefania Vitale, Alberto Torrisi, Antonino Licciardello Department of Chemical Sciences and CSGI, University of Catania, Viale A. Doria n° 6, 95125, Catania, Italy * Corresponding author: email:
[email protected], Telephone/Fax +390957385206
ABSTRACT. The continuum equation is used for modelling erosion rate, ion beam induced mixing and reactions during the sputtering process involved in Secondary Ion Mass Spectrometry experiments. We developed a new approach that is able to incorporate the beam induced reactivity, so leading to a reasonable simulation of depth profiles of polymers and organic solids. The model allows to include the effects of the reactive gas dosing on sputtering yield and damage accumulation during profiling. Comparison with experimental data confirms the quality of the model and strengthens the proposed approach.
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1. Introduction The capability of acquiring molecular depth profiles of polymer-based materials was for many years the “holy grail” of secondary ion mass spectrometry as, under monoatomic primary beam bombardment, organic targets undergo a strong damage, resulting in loss of molecular information, once the “static limit”1 is exceeded. However, the introduction of cluster beams made molecular depth profiling of organics and polymers possible.2-4 A strong relation between the specific chemical reactivity of the polymer under bombardment and the intensity of its structure-characteristic fragments in the SIMS spectrum has been demonstrated in the case SF5+, fullerene beams (C60) and estimated from molecular dynamics simulations in the case of relatively low-mass argon clusters (Arn with n
