Correction to Ultrahigh Resolution Titanium Deep Reactive Ion Etching

Addition/Correction www.acsami.org

Correction to Ultrahigh Resolution Titanium Deep Reactive Ion Etching Bryan W. K. Woo, Shannon C. Gott, Ryan A. Peck, Dong Yan, Mathias W. Rommelfanger, and Masaru P. Rao* ACS Appl. Materials Interfaces 2017, 9 (23), 20161−20168. DOI: 10.1021/acsami.6b16518

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ue to a production error, the Acknowledgment section in the final print version was inadvertently replaced by one from another paper. In addition, numerous requested corrections throughout the text were not implemented at galley stage. The corrected version of the paper was posted to the Web site on June 29, 2017.

© XXXX American Chemical Society

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DOI: 10.1021/acsami.7b08904 ACS Appl. Mater. Interfaces XXXX, XXX, XXX−XXX