Determination of argon in sputtered silicon films by energy-dispersive

Mar 30, 1981 - (10) Tróvate, E. R.; Barron, J. W.; Slayton, J. L, Report EPA/903/9-78/. 006, TP-15. PB 287 707; NtlS: ... ersity of California: Liver...
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Anal. Chem. 1981, 53, 1792-1795

1792

(21) Christensen, L. H., submltted to Anal. Chim. Acta. (22) Hubbell, J. H. NBS Spec. Pub/. ( U . S . ) 1977, No. 467, 3-16. (23) Heinrich, K. F. J. In "The Electron Microprobe"; McKinley, T. D., Helnrich, I