Direct Observation of the Thickness-Induced Crystallization and Stress

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Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films Bärbel Krause, Gregory Abadias, Anny Michel, Peter Wochner, Shyjumon Ibrahimkutty, and Tilo Baumbach ACS Appl. Mater. Interfaces, Just Accepted Manuscript • DOI: 10.1021/acsami.6b12413 • Publication Date (Web): 22 Nov 2016 Downloaded from http://pubs.acs.org on December 5, 2016

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Direct Observation of the Thickness-Induced Crystallization and Stress

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