7 Dependence o f D i s s o l u t i o n R a t e o n Processing a n d M o l e c u l a r Parameters o f Resists 1
A. C. OUANO T. J. Watson Research Center, IBM Corporation, Yorktown Heights, NY 10598 In this paper we explore factors beyond the well known molecular weight and chemical effects on the dissolution kinetics of polymers. In our studies we show that factors controlling solvent mobility in polymeric matrices, such as stereo chemistry (tacticity), processing (heat treatment) and solvent molecular size may affect the dissolution kinetics of polymers far more strongly than factors affecting the equilibrium solubility, e.g. molecular weight of the polymer. It is shown that while the dissolution rate scales to approximate ly -0.7 power of the polymer molecular weight (P(MMA), 10K
