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Electroless Plating of Thin Gold Films Directly onto Silicon Nitride Thin Films and into Micropores Julie C. Whelan, Buddini Iroshika Karawdeniya,† Y.M. Nuwan D.Y. Bandara,† Brian D. Velleco, Caitlin M. Masterson, and Jason R. Dwyer* Department of Chemistry, University of Rhode Island, 51 Lower College Road, Kingston, Rhode Island 02881, United States S Supporting Information *
ABSTRACT: A method to directly electrolessly plate siliconrich silicon nitride with thin gold films was developed and characterized. Films with thicknesses
