Preparation of Low-Density Macrocellular Tin Dioxide Foam with

Feb 8, 2005 - The resulting structure of the as-synthesized tin dioxide (SnO2) was a cellular foam, which was composed of large cells (ca. 103 nm, lar...
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Chem. Mater. 2005, 17, 1115-1122

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Preparation of Low-Density Macrocellular Tin Dioxide Foam with Variable Window Size Qincui Gu, Keiji Nagai,* Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, and Yasukazu Izawa Institute of Laser Engineering, Osaka UniVersity, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan ReceiVed October 5, 2004

Low-density porous tin dioxide (∼0.5 g/cm3) was prepared from a SnCl4/ethanol/H2O mixture and polystyrene (PS) template. Such a low density made the as-synthesized tin dioxide act as a promising target material for laser-induced extreme ultraviolet (EUV) emission. The resulting structure of the assynthesized tin dioxide (SnO2) was a cellular foam, which was composed of large cells (ca. 103 nm, large macropores) interconnected by windows (ca. 102 nm, small macropores). Scanning electron microscope images showed that SnO2 particles of ∼10 nm constituted the cell wall. The space among particles formed mesopores, which were about 7 nm estimated by nitrogen adsorption-desorption isotherm measurements. Therefore, the as-prepared SnO2 showed a hierarchical porous system from macropores to mesopores. The window size on a submicrometer scale was tunable in the range of ∼480-200 nm by changing the molar ratio of ethanol to SnCl4 in tin source solution from 2:1 to 10:1. By consideration that the windows originated from the tight contact area among the PS spheres, some parameters affecting the contacting area among the PS spheres were investigated in order to analyze the effect of ethanol content on the widow size. The wettability of the tin source solution on the PS particle film and the viscosity of the tin source solution were found to be the main reasons responsible for the variable window size. Another observed phenomenon was the change in the SnO2 filling area from the complete filling of voids to a mere coating of the colloidal spheres as the ethanol content was increased, that is, a template transition from a volume template to a surface template was realized by changing the ethanol content. The mechanism was discussed in detail.

Introduction Porous material with a hierarchical pore system is an emerging technology due to applications as catalysts, separation and mass transportation.1-4 Many efforts have been made to prepare silica-based materials with a bimodal or trimodal pore system.5-9 The development of hierarchical nonsiliceous porous materials is also essential for exploring new application fields.10 Among the various porous metal oxides, tin dioxide is one of the most useful materials, which can be applied in many technological fields including solar cells,11 * To whom correspondence should be addressed. Phone: +81-(6)-6879-8778. Fax: +81-(6)-6877-4799. E-mail: [email protected].

(1) Holland, B. T.; Abrams, L.; Stei, A. J. Am. Chem. Soc. 1999, 121, 4308. (2) Davis, S. A.; Burkett, S. L.; Mendelson, N. H.; Mann, S. Nature 1997, 385, 420. (3) Yang, P.; Deng, T.; Zhao, D.; Feng, P.; Pine, D. Science 1998, 282, 2244. (4) Velev, O. D.; Tessier, P. M.; Lenhoff, A. M.; Kaler, E. W. Nature 1999, 401, 548. (5) Huerta, L.; Guillem, C.; LaTorre, J.; Beltra´n, A.; Beltra´n, D.; Amoro´s, P. Chem. Commun. 2003, 1448. (6) Suzuki, K.; Ikari, K.; Imai, H. J. Mater. Chem. 2003, 13, 1812. (7) Bagshaw, S. A. Chem. Commun. 1999, 1785. (8) Haskouri, J. E.; Za´rate, D.; Guillem, C.; Amoro´s, P.; Calde´s, M.; Marcos, M. D.; Beltra´n, D.; LaTorre, J.; Amoro´s, P. Chem. Mater. 2002, 14, 4502. (9) Zhang, B. J.; Davis, S. A.; Mann, S. Chem. Mater. 2002, 14, 1369. (10) Miyat, H.; Itoh, M.; Watanabe, M.; Noma, T. Chem Mater. 2003, 15, 1334. (11) Srivastava, D. N.; Chappel, S.; Palchik, O.; Zaban, A.; Gedanken, A. Langmuir 2002, 18, 4160.

gas sensors,12,13 lithium battery,14 separation,15 etc. Recently, it has been proved that low-density tin oxide (SnO2) (1.5 g/cm3) is an important target material for producing narrow extreme ultraviolet (EUV) emission with a high conversion efficiency.16,17 EUV lithography (EUVL) will be a key technology for carving electric circuit nodes less than several tens of namometers into silicon wafers in succeeding years.18 To prepare SnO2 with density lower than 1.5 g/cm3 is very important for EUV emission target material fabrication. A wide range of techniques has been exploited to synthesize tin dioxide, such as sol-gel, spray pyrolysis, chemical vapor deposition (CVD), magnetron sputtering, evaporation of metallic tin in an oxygen atmosphere, sonication, anodic oxidation process, supramolecular template technique, etc.11,12,19-23 Most of these techniques provide tin (12) Chen, F. L.; Liu, M. L. Chem. Commun. 1999, 1829. (13) Manorama, S. V.; Gopal Reddy, C. V.; Rao, V. J. Nanostructured Mater. 1999, 11, 643. (14) Lytle, J. C.; Yan, H.; Ergang, N. S.; Smyrl, W. H.; Stein, A. J. Mater. Chem. 2004, 1616. (15) Schmidt-Winkel, P. S.; Lukens, W. W.; Zhao, D. Y.; Yang, P. D.; Chmelka, B. F.; Stucky, G. D. J. Am. Chem. Soc., 1999, 121, 254. (16) Nagai, K.; Nishimura, H.; Okuno, T.; Hibino, T.; Matsui, R.; Tao, Y. Z.; et al. Trans. Mater. Res. Soc. Jpn, 2004, 29(3), 943. (17) Chou, I. W.; Daido, H.; Yamagami, S.; Nagai, K.; Norimatsu, T.; Takabe, H. J. Opt. Soc. Am. B, 2000, 17, 1616. (18) Nishimura, H.; Shigemori, K.; Nakai, M. J. Plasma Fusion Res. 2004, 80, 325. (19) Shin, H. C.; Dong, J.; Liu, M. L. AdV. Mater. 2004, 16, 237. (20) Ulagappan, N.; Rao, D. N. R. Chem. Commun. 1996, 1685. (21) Qi, L.; Ma, J.; Cheng, M.; Zhao, Z. Langmuir 1998, 14, 2579.

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dioxide with a microporous or mesoporous structure. In addition, the colloidal-crystal templating method is an effective approach for preparing macroporous metal oxide materials.14,24,25 In the present study, the polystyrene (PS) sphere template technique is introduced in order to prepare low-density tin dioxide with hierarchical pore systems from mesopores to macropores. The resulting structure of the porous metal oxides using the colloidal-crystal template method is called cellular foam (CF), which is composed of large spherical cells interconnected by opening windows to create a continuous pore system.15,26 Such a structure easily affords low-density porous metal compounds. In addition, many applications of porous materials are strongly dependent on the windows, and therefore, it is important to control the pore structure and the window size. Up to now, only a few examples about controlling the window size have been reported.25,27-29 Schmidt et al. obtained siliceous mesostructured cellular foams with variable window size by adding ammonium fluoride to the oil-in-water microemulsion.27 Lukens et al. also prepared mesocellular silica foams with tunable windows by varying the silica-to-surfactant ratio, where the obtained window size was controlled in the range of mesopore from several to 20 nm.28 The effects of alkoxide dilution with ethanol were investigated for macroporous silica, titania, and zirconia samples by Holland et al.29 Their result showed that the window size was enlarged by the increasing dilution. By use of a poly(methyl methacrylate) (PMMA) sphere template, Lytle et al. obtained a porous tin dioxide with different window sizes and SnO2 crystalline grain sizes by calcination at different temperatures.14 In the present study, the hierarchical porous SnO2 with a variable window size was synthesized by diluting the tin precursor solution with ethanol, while the size of the grains constituting the SnO2 crystal remained almost unaffected. The dilution effect is discussed in detail. Experimental Part Materials. Styrene and potassium persulfate (K2S2O8) were commercially supplied by Aldrich and the Nacarai Chemical Co. (Kyoto), respectively. Anhydrous tin tetrachloride (SnCl4) with a 99.99% purity was purchased from Katayama Chemical Industrial Co. The ethanol (99.5%, Kishida Chemical Co.) was used without further purification. The water was purified by a Yamato WG 262 distilling system and used for the synthesis of the PS and hydrolysis of the tin precursor. Synthesis. 1. Synthesis of Surfactant-Free PS. PS particles were synthesized by a surfactant-free emulsion polymerization process (22) Severin, K. G.; Abdel-Fattah, T. M.; Pinnavaia, T. J. Chem. Commun, 1998, 1471. (23) Thierry, T.; Odile, B.; Bernard, J.; Gil, V. Chem. Mater. 2003, 15, 4691. (24) Zhong, Z.; Yin, Y.; Gates, B.; Xia, Y. AdV. Mater. 2000, 12, 206. (25) Shchukin, D. G.; Caruso, R. A. Chem. Mater. 2004, 16, 2287. (26) Gu, Z. Z.; Uetsuka, H.; Takahashi, K.; Nakajima, R.; Onishi, H.; Fujishima, A.; Sato, O. Angew. Chem., Int. Ed. 2003, 42, 894. (27) Schmidt-Winkel, P.; Lukens, W. W.; Yang, P. D.; Margolese, D. I.; Lettow, J. S.; Ying, J. Y.; Stucky, G. D. Chem. Mater. 2000, 12, 686. (28) Lukens, W. W.; Yang, P. D.; Stucky, G. D. Chem. Mater. 2001, 13, 28. (29) Holland, B. T.; Blanford, C. F.; Do, T.; Stein, A. Chem. Mater. 1999, 11, 795.

Gu et al.

Figure 1. Preparation of porous SnO2.

(90 wt % dispersed aqueous phase) with K2S2O8 as the initiator (the weight ratio of H2O/K2S2O8 ) 1200:1).29 The reaction was carried out at 80 °C in a N2 atmosphere for 24 h, and the stirring speed was maintained at 250 rpm. The resulting PS spheres were filtered through a mesh to remove any large agglomerates. The PS sphere diameter was determined to be 1.3 µm by scanning electron microscopy (SEM). The PS spheres remained suspended in the mother liquor until needed. The prepared PS sphere emulsion (4 mL) was dropped onto a glass substrate (20 cm2) to obtain a sphere template film. Before they were dropped, the glass substrates were treated with 98% sulfuric acid overnight and then rinsed with deionized water. 2. Preparation of porous SnO2. The procedure of preparing the porous SnO2 is shown in Figure 1. SnCl4 was used as the starting tin source and added to ethanol at the molar ratios of ethanol/SnCl4 of 2:1, 4:1, 6:1, and 10:1. The resulting solution was denoted as solution A. The possible chemical reaction is presented by eq 1, in which a partial ligand exchange takes place. Pure water was mixed with solution A in a volume ratio of 3:1 at room temperature, and this prepared solution was denoted as solution B. A partial hydrolysis reaction might take place after the water was added, as shown in eq 2. However, the condensation reaction of the partially hydrolyzed species was expected to be hindered by the existence of a large amount of ethanol.28,30 SnCl4 + xC2H5OH / SnCl4-x(OC2H5)x + xHCl

(1)

SnCl4-x(OC2H5)x + (y + z)H2O / SnCl4-x-y(OC2H5)x-z(OH)y+z + yHCl + zC2H5OH (2) Subsequently, the as-prepared PS template was infiltrated by solution B (0.02 mL/cm2) due to capillary forces and the following hydrolysis and condensation processes were carried out at 45 °C for 4 days. The composite was finally calcined at 400 °C for 5 h to decompose the PS, and porous SnO2 was obtained. The above process is illustrated in Figure 2. (30) Mauro, E.; Marco, A.; Luciana, M.; Gabriella, L.; Pietro, S.; Lorenzo, V. J. Am. Ceram. Soc. 2001, 84, 48.

Low-Density Macrocellular Tin Dioxide Foam

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Figure 2. Schematic diagram of preparation procedure of porous SnO2 using PS as a template.

Characterization. SEM images were obtained using a JEOL JSM-7400F field-emission scanning electron microscope operated at an accelerating voltage of 2 kV in the gentle-beam mode (ultralow accelerating voltage and high resolution). The PS sample was coated with platinum to improve the conductivity when observed by the SEM. Wide-angle X-ray diffraction (WAXD) measurements were carried out on a Rigaku RINT2500HF+ WAXD spectrometer with Cu KR radiation at 1.54 Å. The average grain size of the tin dioxide was calculated on the basis of the Scherrer equation as shown in eq 3 L)

kλ β cos θ

Figure 3. SEM images of (a) PS microspheres and (b) porous SnO2 after calcination. (Inset: the magnified MACFs structure. The molar ratio of ethanol/SnCl4 solution is 4:1.)

(3)

where k is the Scherrer shape factor that equals 0.94, λ is the X-ray wavelength of 1.54 Å, β is the peak full width at half-maximum in radians, and θ is the diffraction peak position. Jade 6 XRD processing software was used to analyze the crystalline phase and grain size. The grain size was calculated by fitting the 〈211〉 diffraction peak of SnO2. The nitrogen adsorption-desorption isotherms were measured at 77 K using a high-speed gas sorption analyzer (Quantachrome Nova 1000). Before the analysis, each sample was degassed at 373 K for 6 h under vacuum. The adsorption data at the relative pressure of P/P0 ) 0.30 was used to calculate the single point Brunauer-Emmett-Teller (BET) surface area. The pore size distribution was obtained from the desorption branch of the isotherms using the Barrett-Joyner-Halenda (BJH) method. The viscosity of the tin source solution (1 mL) was measured using a DV-E digital viscometer (Tokyo Keiki). The contact-angle measurements were performed in order to determine the wettability of the tin source solution on the PS film. A drop of the tin source solution with a 1-mm diameter was dropped onto the PS film. The angle measurement was carried out after the solution droplet was in contact with PS film for 20 s, and the measurements were repeated three times for each sample.

Results and Discussion 1. Characterization of Porous SnO2. Figure 3 shows the SEM images of the PS sphere template and corresponding porous SnO2 after decomposing the PS. As seen in Figure

Figure 4. Schematic diagram of window formation mechanism.

3a, the PS spheres are closely stacked together and the average sphere diameter is 1.3 µm. The porous SnO2 with a CF structure is obtained after calcination, as presented in Figure 3b. The magnified CF structure in the inset of Figure 3b clearly shows that the as-synthesized SnO2 is composed of large spherical cells (∼103 nm) interconnected by small windows (∼hundreds nanometers).15 The circle and the arrow in the inset of Figure 3b point out the position of the cell and the window, respectively. Because the cell size (∼103 nm) is in the range of macropores,31 the terms of macrocellular foams (abbreviated as MACFs) is adopted to describe the resulting structure of the porous SnO2. The cells in the MACFs correspond to the area occupied by the template spheres, and the windows mainly originate from the tightly contacting regions among the PS spheres where the source solution cannot infiltrate.28 The window formation mechanism is illustrated in Figure 4. In Figure 4a, the PS spheres are coated by the tin compound during the infiltration process, while the tight contact area among the PS spheres has no tin coating because the tin source solution cannot penetrate into it. After calcination, the void space left in the original contact area constitutes the window. The magnified SEM image in Figure 5 indicates that the cell wall is composed of about 10-nm particles. The (31) Gates, B.; Yin, Y. D.; Xia, Y. N. Chem. Mater. 1999, 11, 2827.

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Figure 5. The magnified SEM image of porous SnO2 with crystalline particles in the cell wall (using the sample prepared with 6:1 ethanol/tin tetrachloride solution).

interparticle void space differentiated by the SEM is smaller than 10 nm, which consists of the mesopore structure of porous SnO2. Therefore, it can be concluded that the asprepared porous SnO2 shows a hierarchical pore system at three different scale length, that is, mesopore-the interparticle space (