Toward the Understanding of Selective Si Nano-Oxidation by Atomic

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Toward the Understanding of Selective Si Nano-Oxidation by Atomic Scale Simulations Umedjon Khalilov,* Annemie Bogaerts, and Erik C. Neyts Research group PLASMANT, Department of Chemistry,, University of Antwerp, Universiteitsplein 1, 2610 Antwerp, Belgium CONSPECTUS: The continuous miniaturization of nanodevices, such as transistors, solar cells, and optical fibers, requires the controlled synthesis of (ultra)thin gate oxides (