Visible Metasurfaces for On-Chip Polarimetry - ACS Publications

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Letter

Visible Metasurfaces for On-chip Polarimetry Pin Chieh Wu, Jia-Wern Chen, Chih-Wei Yin, Yi-Chieh Lai, Tsung Lin Chung, Chun Yen Liao, Bo Han Chen, Kuan-Wei Lee, Chin-Jung Chuang, Chih-Ming Wang, and Din Ping Tsai ACS Photonics, Just Accepted Manuscript • DOI: 10.1021/acsphotonics.7b01527 • Publication Date (Web): 14 Dec 2017 Downloaded from http://pubs.acs.org on December 14, 2017

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Visible Metasurfaces for On-chip Polarimetry Pin Chieh Wu1,*, Jia-Wern Chen2, Chih-Wei Yin3, Yi-Chieh Lai2, Tsung Lin Chung2, Chun Yen Liao2, Bo Han Chen2, Kuan-Wei Lee2, Chin-Jung Chuang3, Chih-Ming Wang3,*, and Din Ping Tsai1,2,*

1

Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan 2

3

Department of Physics, National Taiwan University, Taipei 10617, Taiwan

Department of Opto-electronic Engineering, National Dong Hwa University, Hualien 97401, Taiwan *E-mail: [email protected]; [email protected]; [email protected]

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Abstract Measuring the polarization state of light and determining the optical properties of chiral materials are inherently complex issues because of the requirement of consequential measurements between different orthogonal states of polarization. Here, we introduce an on-chip polarimetry based on the visible metasurfaces for addressing the issue of polarization analysis with compact components. We demonstrate integrated metasurface chips can effectively determine a set of Stokes parameters covering a broad wave-band at visible light. For the proof of concept, the optical properties of chiral materials are measured using our proposed device, while experimental verification are convincing by comparing with the data obtained from commercial ellipsometry. Keywords: Visible metasurfaces, Aluminium plasmonics, On-chip polarimetry, Polarization analysis

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Polarization is one of the key properties of an electromagnetic wave for information delivery and signal measurement. Analyzing the polarization state of light therefore can provide details regarding to the physical systems, even material properties1. For instance, chiral materials, which are common in biological compounds, can be classified from consequential analyses of circular polarizations2, 3. Typically, experimental realization of the polarization states requires sequential measurements (such as polarimeter or ellipsometer) with properly arranged optical components like polarizers and wave-plates in the optical system (especially in front of the detectors). It allows us eventually retrieving the information of Stokes parameters, which enable completely describing the polarization of light4. Beside single detection for each orthogonal polarization state, one can also measure all states simultaneously by splitting the incident light beam into a couple of light beams with multiple sets of optical components5, 6. However, such approaches significantly increase the sizes, cost, and complexity of the entire optical system. The recent desire for miniaturizing the optical systems is subsequently obvious, that will benefit the development of an innovate class for flat optical components and onchip integration. To address abovementioned issue, it is necessary to introduce strong polarization-dependent interactions between light and interested matters at a small spatial scale. Metasurfaces are ultrathin artificially designed optical scatterers, which enable abrupt changes to the optical features such as electromagnetic amplitude and phase of scattered light within a subwavelength spatial region7-11. These properties provide a great flexibility in light control and profit the development of flat optical components and 3


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systems12-20. Particularly, the optical response of metasurfaces are mostly polarizationdependent21-24, therefore, they can be promising for probing the polarization states after careful designs. For example, previous works have utilized space-variant metasurfaces (also refers to geometric or Pancharatnam–Berry phase based metasurfaces) to distinguish states of polarization25, 26. The dipolar-resonant based metasurfaces have also been proposed for detecting linearly polarized light with related intensity change of anomalous beams. Although successful, to completely interpret the states of polarization, one must obtain the whole set of Stokes parameters4, 27. For this purpose, there have been demonstrations of measure of the Stokes parameters at near-infrared and partial of the visible spectrum using reflective antennas based metasurfaces28. The compact dimensions of metasurfaces even provide a flexible channel for integrating several required chips, hence extending the functionality of metasurfaces15, 29-32. However, these lectures only suggest the polarization analysis with metasurfaces from probing a laser light beam with a known state of polarization. Nevertheless, there is still lack of measuring the properties of real materials with on-chip metasurfaces for practical applications. Here, a state-of-the-art demonstration is presented for realizing practical applications of determining Stokes parameters with visible metasurfaces. To make them working over the entire visible spectrum, aluminum (Al) is employed as the metallic material of metasurfaces33,

34

. To obtain the related intensity between different

polarization states at one single snapshot, six metasurface chips are integrated onto one single sample (so-called on-chip polarimetry, see Figure 1). One metasurface chip assists in detecting the intensity of one specific polarization state, therefore, one can attain a set 4


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of Stokes parameters simultaneously with the absent of optical components in front of the detector (a sCOMS camera in our case). To further evaluate our proposed device, samples with chiral properties35-37 (which will rotate/change the polarization state of the output light beam when the incident linear polarization is kept unchanged) are measured using both on-chip polarimetry and commercial ellipsometry. The fair agreement of these results shows that the on-chip polarimetry can yield accurate determination of optical properties of unknown samples, with a more compact track compared to the commercial systems. Comparing with previously reported lecture38, which only uses Pancharatnam– Berry (P-B) phase based metasurfaces as the building blocks, our metasurfaces is able to completely decompose all polarization states on the Poincaré sphere. Our work therefore provides a practical way for innovating flat devices in optical communication, signal detection, quantum optics, etc. DESIGN OF METASURFACE CHIPS To completely characterize the reflected light with unknown polarization state, it can be achieved with analysis of the relative intensity between distinct polarization states. For practical applications with compact devices, as discussed above, six metasurface chips are monolithically integrated onto a single sample. Each metasurface is responsible for steering one eigen-polarization component of incidence into distinct spatial position, as shown in Figure 1. All metasurfaces are designed via Al nano-antenna with correspondingly optimized structural dimensions for different polarizations (see Supporting Information, Part 1). The polarization-dependent beam steering can be realized using gradient metasurfaces with various design principles. For linear 5


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polarizations (LP), one can optimize the structural parameters of nano-antennas to accomplish 2π phase shift with reliable reflection efficiency, as shown in Figures 2a and 2b. In terms of circular polarization (CP), geometric phase provides a promising design rule for achieving 2π phase shift, which decouples from the amplitude modulation because of the space-invariant structural sizes39, 40, as shown in Figure 2c. For simplicity, the length of supercell (which means the minimal length where the 2π phase gradient distribution is achieved) of six metasurface chips keep as the same at 1600 nm, while each corresponding anomalous reflected beam is separated via spatially arranging the metasurface chips. Figure 2d shows the angle of anomalous reflection as a function of incident wavelength (see Supporting Information, Part 2 for detailed information). The variation of reflected angle is within 20° when the wavelength changed across the whole range of visible light. It is worth mentioning that the level number of each gradient metasurface can be changed at will, and one can obtain the relative intensity of each polarization component at arbitrary observation angle. Because of the introduction of Al plasmonics, the working wave-band can be pushed to the blue light with acceptable efficiency41. Figure 2e shows the simulated efficiency of the anomalous deflection of six designed metasurface chips. The operation efficiencies generally show good performance over the entire range of visible light. Although the efficiency drops at the spectrum boundaries, our proposed device still works well for the polarization analysis because of the use of self-reference (the detailed discussions will be given in the last section). SAMPLE PREPARATIONS

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Based on the above discussions, six metasurface chips are fabricated and subsequently integrated into one single sample for realizing an on-chip polarimetry. Figure 3a shows the scanning electron microscope (SEM) images of the on-chip polarimetry consisting of six metasurface chips. The supercell of each metasurface chip composed of 8 unit elements, in which 4-level and 8-level phase gradient are employed for linear and circular polarizations, respectively. For the proof of concept, Stokes parameters of the light beam after interacting with chiral samples are measured through our device. The testing samples are different layers of commonly used commercial-grade packing tape, also called biaxially oriented polypropylene (BOPP) films. It is commonly used in manufacture, especially for package because of its high flexibility and good adhesion42. Such BOPP film exhibits strong optical birefringence (which means the optical response is different when it interacts with x- or y-polarized light) because its polymer chains is aligned along the long axis, leading to the chiral molecule chains (see in Figure 3b). As shown in Figure 3c, when the single layer BOPP film is sandwiched by a set of linear cross polarizer, it shows light yellow color under white light illumination. The color changes to blue, pink, and light green when the layer number of BOPP films is two, three, and four, respectively. These images not only verify the chiral property of BOPP films, but also reveal such chiral property highly depending on the wavelength of incidence. Therefore, an on-chip polarimetry working in a wide range of visible wavelength is required for determining the optical properties of such highly chiral materials. EXPERIMENTAL RESULTS AND DISCUSSIONS

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To analyze the chirality of the BOPP films, a y-polarized light is firstly generated using a half wave-plate and a linear polarizer, and goes through the transparent BOPP films (see Figure 4a). Due to the chiral property of BOPP films, a light beam with unknown polarization state consequently interact with the on-chip polarimetry, and then generate six deflected light beams from gradient metasurfaces. According to the diffraction pattern from the CCD images (see Supporting Information, Part 3), the powers of the deflected beams from each polarization states are individually integrated. The Stokes parameters are consequently obtained based on the integrated power of each polarization state. To suppress the influence from the different efficiency of metasurfaces, each Stokes parameter is normalized to the corresponding power of the polarization state (so called self-reference). That is, the ܵ′ଵ =

୍ಽುೇ ି୍ಽುಹ ୍ಽುೇ ା୍ಽುಹ

, ܵ′ଶ =

୍ಽುశరఱ° ି୍ಽುషరఱ° ୍ಽುశరఱ° ା୍ಽುషరఱ°

, and ܵ′ଷ =

୍ೃ಴ು ି୍ಽ಴ು ୍ೃ಴ು ା୍ಽ಴ು

. It

means that the absorption and depolarization of the sample are not involved into the analysis, which is reliable because the testing samples are transparent and optically flat. Under these assumptions, stable measurement results with minimized alignment tolerance can be attained. Figure 4b shows the measured Stokes parameters as a function of wavelength from our on-chip polarimetry. Here, the Stokes parameters are normalized for making the total light intensity as unity: ܵଵ =

ௌభᇲ

ටௌభᇲమ ାௌమᇲమ ାௌయᇲమ

, ܵଶ =

ௌమᇲ


, ܵଷ =

ௌయᇲ


(1)

where ܵ଴ = ඥܵଵଶ + ܵଶଶ + ܵଷଶ = 1. According to our measured results, one can obviously

analyze the birefringence and dichroism of the testing samples over the entire visible 8


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spectrum. Indeed, the Stokes parameters can be described as following for further evaluating the polarization state with ellipticity and azimuth angles: ܵ଴ 1 ܵଵ cos 2ߠ cos 2ߝ ܵ = ൦ ൪ = ‫ܫ‬଴ ቎ ቏ ܵଶ cos 2ߠ sin 2ߝ sin 2ߠ ܵଷ

(2)

where I0, θ, and ε are the total intensity, ellipticity angle, and azimuth angle, respectively. The polarization state of the light beams, which is the outcome of the y-polarized light interacts with the BOPP films, can be comprehended through Eq. (2). Take wavelength λ = 633 nm as an example, according to the measured results, we found that the single layer of BOPP film acts as a half wave-plate because the measured final polarization is close to an x-polarization. For the case of four layers of BOPP films, it can be regarded as a quarter wave-plate because of the circular polarization state of the scattered light (see orange dots and olive symbols in Figure 4c). To evaluate the performance of our on-chip polarimetry, we compare the measured results from on-chip polarimetry with the ones measured using commercial ellipsometry. As shown in Figure 4c, these measured results show fair agreements with each other, indicating the proposed on-chip polarimetry indeed offer a promising method for analyzing the chiral materials with compact dimensions. It is worth mentioning that the resolved property from on-chip polarimetry and commercial ellipsometry for two layers of BOPP films actually matches very well in between (see olive symbols at the bottom panel in Figure 4c). The counterfeit difference is mainly from the sing of the azimuth angle, which is very sensitive when the long-axis of polarization ellipse is roughly aligned along the y-axis. 9


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In summary, an on-chip polarimeter with visible metasurfaces is proposed. Due to its broad working bandwidth, the complete Stokes parameters can be resolved across entire visible spectrum. The demonstrations with metasurfaces make them for feasible applications of analyzing the optical properties of unknown chiral matters. For future perspective, one can illuminate the incident light (which is to be measured) onto the metasurface chip individually, which enables resolving both polarization property and spectral information together using one single device. Compared with commercial ellipsometry, our device shows reliable performance on polarization analysis as well as spectral measurement with more compact dimensions. We envisage that the on-chip spectropolarimeter will pave an innovate class for the development of flat optical devices in polarization control, chiral molecule detections, and material analysis, just named a few.

METHODS Fabrication of On-chip Spectropolarimeter. All metasurface chips are fabricated by standard electron beam lithography and lift-off process. A 30-nm-thick SiO2 is deposited using plasma-enhanced chemical vapor deposition (PECVD) on a 150-nm-thick aluminum mirror followed by a bare silicon substrate. The 495K PMMA photoresist was then deposited by spin coating and pre-baked at 180 °C for 3 min. After electron beam writing with 30 pA current, the sample was developed in a solution of isopropyl alcohol (IPA) and methyl isobutyl ketone (MIBK) of IPA:MIBK = 3:1 for 60 s. The sample was subsequently rinsed with IPA for 60 s and blow-dried with nitrogen gun. 10


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Aluminum with the desired thickness was then deposited via electron beam evaporator. The aluminum metasurfaces were consequently deﬁned on the pre-prepared substrate after the lift-off process. Numerical Simulation. All simulation results were performed with the commercial software CST Microwave Studio. For the case of single cell design, a unit cell boundary condition is employed for the simulation of reﬂection and phase shift in an array structure. The refractive index of SiO2 is obtained from Ref. 43. The permittivity of aluminum in the visible regime is described by the Drude model, with bulk plasma frequency of 14.4 eV and damping constant of 1.1 eV. It has been shown that the oxidation layer of the Al barely affects its optical properties under off-resonant condition. Therefore, the oxidation layer of the Al is not considered.

Acknowledgments The authors acknowledge financial support from Ministry of Science and Technology, Taiwan (Grant No. MOST-106-2745-M-002-003-ASP and 104-2221-E-259-028-MY3) and Academia Sinica (Grant No. AS-103-TP-A06). They are also grateful to National Center for Theoretical Sciences, NEMS Research Center of National Taiwan University, National Center for High-Performance Computing, Taiwan, and Research Center for Applied Sciences, Academia Sinica, Taiwan for their supports.

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References (1) N. Berova, K. Nakanishi, and R. Woody, Circular Dichroism: Principles and Applications (Wiley, 2000). (2) Freedman, T. B.; Cao, X.; Dukor, R. K.; Nafie, L. A. Absolute Configuration Determination of Chiral Molecules in the Solution State Using Vibrational Circular Dichroism. Chirality 2003, 15, 743-758. (3) Hall, S. A.; Hoyle, M.-A.; Post, J. S.; Hore, D. K. Combined Stokes Vector and Mueller Matrix Polarimetry for Materials Characterization. Anal Chem 2013, 85, 7613-7619. (4) Pors, A.; Nielsen, M. G.; Bozhevolnyi, S. I. Plasmonic Metagratings for Simultaneous Determination of Stokes Parameters. Optica 2015, 2, 716-723. (5) Azzam, R. M. A. Division-of-Amplitude Photopolarimeter Based on Conical Diffraction from a Metallic Grating. Appl Optics 1992, 31, 3574-3576. (6) Gori, F. Measuring Stokes Parameters by Means of a Polarization Grating. Opt Lett 1999, 24, 584-586. (7) Hsiao, H.-H.; Chu, C. H.; Tsai, D. P. Fundamentals and Applications of Metasurfaces. Small Methods 2017, 1, 1600064. (8) Zhang, L.; Mei, S.; Huang, K.; Qiu, C.-W. Advances in Full Control of Electromagnetic Waves with Metasurfaces. Adv. Opt. Mater. 2016, 4, 818-833. (9) Genevet, P.; Capasso, F.; Aieta, F.; Khorasaninejad, M.; Devlin, R. Recent Advances in Planar Optics: From Plasmonic to Dielectric Metasurfaces. Optica 2017, 4, 139-152. (10) Hou-Tong, C.; Antoinette, J. T.; Nanfang, Y. A. Review of Metasurfaces: Physics and Applications. Rep. Prog. Phys. 2016, 79, 076401. (11) Wang, S.; Zhan, Q. Reflection Type Metasurface Designed for High Efficiency Vectorial Field Generation. 2016, 6, 29626. (12) Hu, J.; Liu, C.-H.; Ren, X.; Lauhon, L. J.; Odom, T. W. Plasmonic Lattice Lenses for Multiwavelength Achromatic Focusing. ACS Nano 2016, 10, 10275-10282. (13) Tseng, M. L.; Yang, J.; Semmlinger, M.; Zhang, C.; Nordlander, P.; Halas, N. J. Two-Dimensional Active Tuning of an Aluminum Plasmonic Array for Full-Spectrum Response. Nano Lett. 2017. (14) Wu, P. C.; Zhu, W.; Shen, Z. X.; Chong, P. H. J.; Ser, W.; Tsai, D. P.; Liu, A.-Q. Broadband WideAngle Multifunctional Polarization Converter via Liquid-Metal-Based Metasurface. Adv. Opt. Mater. 2017, 5, 1600938. (15) Wu, P. C.; Tsai, W.-Y.; Chen, W. T.; Huang, Y.-W.; Chen, T.-Y.; Chen, J.-W.; Liao, C. Y.; Chu, C. H.; Sun, G.; Tsai, D. P. Versatile Polarization Generation with an Aluminum Plasmonic Metasurface. Nano Lett. 2017, 17, 445-452.

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(16) Arbabi, A.; Arbabi, E.; Kamali, S. M.; Horie, Y.; Han, S.; Faraon, A. Miniature Optical Planar Camera Based on a Wide-Angle Metasurface Doublet Corrected for Monochromatic Aberrations. Nat. Commun. 2016, 7, 13682. (17) Chen, B. H.; Wu, P. C.; Su, V.-C.; Lai, Y.-C.; Chu, C. H.; Lee, I. C.; Chen, J.-W.; Chen, Y. H.; Lan, Y.-C.; Kuan, C.-H.; Tsai, D. P. GaN Metalens for Pixel-Level Full-Color Routing at Visible Light. Nano Lett. 2017, 17, 6345-6352. (18) Zheng, G.; Mühlenbernd, H.; Kenney, M.; Li, G.; Zentgraf, T.; Zhang, S. Metasurface Holograms Reaching 80% Efficiency. Nat. Nano. 2015, 10, 308-312. (19) Wang, S.; Wu, P. C.; Su, V.-C.; Lai, Y.-C.; Hung Chu, C.; Chen, J.-W.; Lu, S.-H.; Chen, J.; Xu, B.; Kuan, C.-H.; Li, T.; Zhu, S.; Tsai, D. P. Broadband Achromatic Optical Metasurface Devices. Nat. Commun. 2017, 8, 187. (20) Huang, Y.-W.; Lee, H. W. H.; Sokhoyan, R.; Pala, R. A.; Thyagarajan, K.; Han, S.; Tsai, D. P.; Atwater, H. A. Gate-Tunable Conducting Oxide Metasurfaces. Nano Lett. 2016, 16, 5319-5325. (21) Pfeiffer, C.; Zhang, C.; Ray, V.; Guo, L. J.; Grbic, A. High Performance Bianisotropic Metasurfaces: Asymmetric Transmission of Light. Phys. Rev. Lett. 2014, 113, 023902. (22) Wu, P. C.; Papasimakis, N.; Tsai, D. P. Self-Affine Graphene Metasurfaces for Tunable Broadband Absorption. Phys. Rev. Applied 2016, 6, 044019. (23) Chu, C. H.; Tseng, M. L.; Chen, J.; Wu, P. C.; Chen, Y.-H.; Wang, H.-C.; Chen, T.-Y.; Hsieh, W. T.; Wu, H. J.; Sun, G.; Tsai, D. P. Active Dielectric Metasurface based on Phase-Change Medium. Laser & Photon. Rev. 2016, 10, 986-994. (24) Lee, Y.; Park, M.-K.; Kim, S.; Shin, J. H.; Moon, C.; Hwang, J. Y.; Choi, J.-C.; Park, H.; Kim, H.-R.; Jang, J. E. Electrical Broad Tuning of Plasmonic Color Filter Employing an Asymmetric-Lattice Nanohole Array of Metasurface Controlled by Polarization Rotator. ACS Photonics 2017, 4, 19541966. (25) Shaltout, A.; Liu, J.; Kildishev, A.; Shalaev, V. Photonic spin Hall effect in gap plasmon metasurfaces for on-chip chiroptical spectroscopy. Optica 2015, 2, 860-863. (26) Wen, D.; Yue, F.; Kumar, S.; Ma, Y.; Chen, M.; Ren, X.; Kremer, P. E.; Gerardot, B. D.; Taghizadeh, M. R.; Buller, G. S.; Chen, X. Metasurface for Characterization of the Polarization State of Light. Opt. Express 2015, 23, 10272-10281. (27) Ding, F.; Pors, A.; Chen, Y.; Zenin, V. A.; Bozhevolnyi, S. I. Beam-Size-Invariant Spectropolarimeters Using Gap-Plasmon Metasurfaces. ACS Photonics 2017, 4, 943-949. (28) Chen, W. T.; Török, P.; Foreman, M. R.; Liao, C. Y.; Tsai, W.-Y.; Wu, P. R.,; Tsai, D. P. Integrated Plasmonic Metasurfaces for Spectropolarimetry. Nanotechnology 2016, 27, 224002. 13


ACS Photonics 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 14 of 20

(29) Espinosa-Soria, A.; Rodríguez-Fortuño, F. J.; Griol, A.; Martínez, A. On-Chip Optimal Stokes Nanopolarimetry Based on Spin–Orbit Interaction of Light. Nano Lett. 2017, 17, 3139-3144. (30) Zhang, C.; Yue, F.; Wen, D.; Chen, M.; Zhang, Z.; Wang, W.; Chen, X. Multichannel Metasurface for Simultaneous Control of Holograms and Twisted Light Beams. ACS Photonics 2017, 4, 1906-1912. (31) Ma, R.-M.; Yin, X.; Oulton, R. F.; Sorger, V. J.; Zhang, X. Multiplexed and Electrically Modulated Plasmon Laser Circuit. Nano Lett. 2012, 12, 5396-5402. (32) Wang, L.; Xu, B.-B.; Cao, X.-W.; Li, Q.-K.; Tian, W.-J.; Chen, Q.-D.; Juodkazis, S.; Sun, H.-B. Competition between Subwavelength and Deep-Subwavelength Structures Ablated by Ultrashort Laser Pulses. Optica 2017, 4, 637-642. (33) Knight, M. W.; King, N. S.; Liu, L.; Everitt, H. O.; Nordlander, P.; Halas, N. J. Aluminum for Plasmonics. ACS Nano 2013, 8, 834-840. (34) Olson, J.; Manjavacas, A.; Liu, L.; Chang, W.-S.; Foerster, B.; King, N. S.; Knight, M. W.; Nordlander, P.; Halas, N. J.; Link, S. Vivid, Full-Color Aluminum Plasmonic Pixels. Proc. Natl. Acad. Sci. 2014, 111, 14348-14353. (35) Valev, V. K.; Baumberg, J. J.; Sibilia, C.; Verbiest, T. Chirality and Chiroptical Effects in Plasmonic Nanostructures: Fundamentals, Recent Progress, and Outlook. Adv. Mater. 2013, 25, 2517-2534. (36) Eslami, S.; Gibbs, J. G.; Rechkemmer, Y.; van Slageren, J.; Alarcón-Correa, M.; Lee, T.-C.; Mark, A. G.; Rikken, G. L. J. A.; Fischer, P. Chiral Nanomagnets. ACS Photonics 2014, 1, 1231-1236. (37) Peer, N.; Dujovne, I.; Yochelis, S.; Paltiel, Y. Nanoscale Charge Separation Using Chiral Molecules. ACS Photonics 2015, 2, 1476-1481. (38) Maguid, E.; Yulevich, I.; Veksler, D.; Kleiner, V.; Brongersma, M. L.; Hasman, E. Photonic SpinControlled Multifunctional Shared-Aperture Antenna Array. Science 2016, 352, 1202-1206. (39) Jiang, S.-C.; Xiong, X.; Hu, Y.-S.; Jiang, S.-W.; Hu, Y.-H.; Xu, D.-H.; Peng, R.-W.; Wang, M. HighEfficiency Generation of Circularly Polarized Light via Symmetry-Induced Anomalous Reflection. Phys. Rev. B 2015, 91, 125421. (40) Ding, X.; Monticone, F.; Zhang, K.; Zhang, L.; Gao, D.; Burokur, S. N.; de Lustrac, A.; Wu, Q.; Qiu, C.-W.; Alù, A. Ultrathin Pancharatnam–Berry Metasurface with Maximal Cross-Polarization Efficiency. Adv. Mater. 2015, 27, 1195-1200. (41) Olson, J.; Manjavacas, A.; Basu, T.; Huang, D.; Schlather, A. E.; Zheng, B.; Halas, N. J.; Nordlander, P.; Link, S. High Chromaticity Aluminum Plasmonic Pixels for Active Liquid Crystal Displays. ACS Nano 2016, 10, 1108-1117.

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(42) Yuksekkalayci, C.; Yilmazer, U.; Orbey, N. Effects of Nucleating Agent and Processing Conditions on the Mechanical, Thermal, and Optical Properties of Biaxially Oriented Polypropylene Films. Polymer Engineering & Science 1999, 39, 1216-1222. (43) Ghosh, G. Dispersion-Equation Coefficients for the Refractive Index and Birefringence of Calcite and Quartz Crystals. Opt. Commun. 1999, 163, 95-102.

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Figure 1. Schematic illustration of the on-chip polarimetry with integrated metasurfaces working at visible light. The light beam with unknown polarization state, which is generated from the sample pending for test, is analyzed by the related intensity of anomalous beams. Due to the on-chip integration of metasurfaces, intensity information of six polarization states are obtained simultaneously. The inset shows the structural configuration of metasurface unit cell: Al nano-antennas with 50 nm thickness on a SiO2/Al/Si substrate. The thicknesses of SiO2 and Al mirror are 30 nm and 150 nm, respectively.

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Figure 2. Simulated reflection (black dots) and phase shift (blue stars) for (a) LP-H, (b) LP+45° and (c) RCP at λ = 521.74 nm. The wavelength choice here is purely random and one can also observe the similar result as the linear correlation of phase shift for arbitrary wavelength at visible light. More details of optimized unit elements for all six metasurface chips can be found in Supporting Information. (c) Prediction for the anomalous reflected angles from numerical (blue dots) and theoretical (olive curve) calculations. Since the length of the supercell of each metasurface chip is identical, the angles of deflection are all the same. (e) Simulated diffraction efficiency of each polarization state from corresponding metasurface chips. LP-H, LP-V, LP+45°, and LP-45° represent the LP along horizontal (x-direction), vertical (y-direction), +45°, and -45°, respectively. RCP and LCP depict the right- and left-hand circular polarization, respectively.

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Figure 3. (a) Scanning electron microscope (SEM) images of on-chip polarimetry with six metasurface chips. Each metasurface chip has footprint of 100 × 100 µm2 with a 50-µm gap between its neighboring chips. (b) The chemical structural formula of the BOPP films. Due to its chiral property, the polarization state is changed after the incident light passes through the films. (c) Photography of the BOPP films with different number of layers. The BOPP films are sandwiched between two linear polarizers, which are cross with each other. Each BOPP film is 25-µm-thick.

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Figure 4. (a) Optical setup for experimentally evaluating the performance of on-chip polarimetry. (b) Measured Stokes parameters of single layer BOPP film using the on-chip polarimetry (solid curves) and ellipsometry (dots). (c) Experimental results of ellipticity angle (top panel) and azimuth angle (bottom panel) from commercial ellipsometry (navy dots) and on-chip polarimetry (orange dots) at λ = 633 nm. All olive symbols denote the measured polarizations, which are realized from measured ellipticity and azimuth angles.

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Table of Contents Graphic

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Visible Metasurfaces for On-Chip Polarimetry - ACS Publications

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