Article pubs.acs.org/JPCC
Dual Role of Hydrogen in Low Temperature Plasma Enhanced Carbon Nanotube Growth Johannes Vanpaemel,†,‡ Marleen H. van der Veen,† Daire J. Cott,† Masahito Sugiura,§ Inge Asselberghs,†,∥ Stefan De Gendt,†,∥ and Philippe M. Vereecken*,†,‡ †
imec, Kapeldreef 75, 3001 Heverlee, Belgium Centre of Surface Chemistry and Catalysis, KU Leuven, Kasteelpark Arenberg 23, 3001 Heverlee, Belgium § Tokyo Electron Ltd., 17 Miyukigoaka, Tsukuba, Ibaraki 305-0841, Japan ∥ Chemistry Department, KU Leuven, Celestijnenlaan 200f, 3001 Heverlee, Belgium ‡
S Supporting Information *
ABSTRACT: The gas composition during carbon nanotube (CNT) growth has received much attention because it largely determines the properties of the nanotubes and the yield of the growth. Here, we investigated the influence of hydrogen to hydrocarbon ratio on the CNT growth at low temperatures (
