MICRO-CIRCUIT JIG AND MASK CHANGER
MORE
VERSATILE
THAN
The micro-circuit jig is complete with a sixposition vapor source, enabling six 2" square substrates to be coated with six different mate rials using six different masks. The jig is also provided with two substrate heaters, one to preheat the substrate to 150°C. and the second to raise the temperature of the substrate in the evaporation position to 300°C. Resistance monitor pick-up points are provided and separate resistance monitor and automatic source shutter can be provided. Standard EDWARDS patented glow discharge cleaning rings are supplied with the jig, along with the rotating six-position vapor source. The accuracy of registration of each successive mask in contact with a given substrate is within ± 0 . 0 0 1 " .
EVER
"SPEEDIVAC" MULTIPLE VAPOR SOURCE
ELECTRON BOMBARDED VAPOR SOURCE Designed as an inexpensive vapor source for depositing thick films of material containing Ni, Fe or Co. The source is complete with a wire feed mechanism and handwheel assembly for continuous controlled evaporation by feed ing wire to the vapor source from the handwheel mounted externally on the coating unit. A complete power supply to operate the source is also available complete with interlocks to the vacuum system.
MARK II MODULATED BEAM PHOTOMETER
VACUUM COATING UNIT
The "Speedivac" Modulated Beam Photometer provides a method of controlling the optical thickness of films deposited by evaporation or sputtering by indicating thé changing optical characteristics of the films as their thickness increases. The instrument measures the reflection from or the transmission through coated glass surfaces as a function of wavelength. Both these quantities can be measured alternately if two light sensing elements are used.
Following are listed some of the special fea tures supplied as standard fittings in the E D W A R D S 19E6 evaporator.
OMEGATRON-MASS SPECTROMETER
Stainless Steel Bell Jar, Viton Gasketting, Six Position V a p o r Source, Substrate H e a t e r , Motor Driven Rotary Substrate Holder, Glow Discharge Cleaning, Ultimate Vacuum with LN 2 trap 2 χ 10 _7 Torr.
The "Speedivac" Omegatron Mass Spectrometer analyzer delivers quantitative and qualitative data of minute quantities of residual gases and vapors in vacuum systems. The unit provides the following characteristics: High Sensitivity · Extended Range · Excellent Resolving Power · Rapid Response, Linear Scan · Pressure Measurement Independent of Gas Composition · High Sensitivity Leak Detection · Simple Construction.
Fast r e l i a b l e p u m p d o w n s are, of course, a feature of all E D W A R D S evaporators. Write for your free technical reprints, written by members of our research staff on "Thin Films and Ultra High Vacuum Techniques."
GENERAL SPECIFICATIONS INCLUDE: Range—Mass 2-200; Resolution — Complete separation of adjacent peaks to mass 32 and very good separation to mass 60; Sensitivity — The unit's high sensitivity enables the analysis of residual gases in the range of 10~e to 10-11 Torr.
EDWARDS HIGH VACUUM INC. / MANUFACTURERS
3279
G R A N D ISLAND BLVD., G R A N D ISLAND, N.Y.
OF THE MOST COMPLETE LINE OF HIGH V A C U U M
C O M PON ENTS A N D
SYSTEMS
Circle No. 38 on Readers' Service Card VOL. 3 5 , N O . 3 , MARCH 1 9 6 3
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