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Highly Conducting and Highly Transparent Oxide/Metal/Oxide Structures for Ultraviolet-C Light Sources Utilizing a Thin Cu Wetting Interlayer Ngoc Minh Le, and Byung-Teak Lee ACS Appl. Mater. Interfaces, Just Accepted Manuscript • DOI: 10.1021/acsami.6b16404 • Publication Date (Web): 25 Aug 2017 Downloaded from http://pubs.acs.org on September 2, 2017
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ACS Applied Materials & Interfaces
Highly Conducting and Highly Transparent Oxide/Metal/Oxide Structures for Ultraviolet-C Light Sources Utilizing a Thin Cu Wetting Interlayer Ngoc Minh Le and Byung-Teak Lee *
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering, Chonnam National University, 300 Yong-bong dong, Gwangju 500-757, Republic of Korea
* Corresponding author: Phone: + 82-62-530-1696, Fax: + 82-62-530-1699 E-mail address:
[email protected] Abstract The Zn0.8-xMg0.2BexO/Cu/Ag/Zn0.8-xMg0.2BexO multilayer structures were designed, sputter deposited at room temperature, and characterized in detail. Results indicated that the multilayer structures with high transmission (higher than 90% at the visual wavelength range) can be readily obtained by simply inserting a thin (~5 nm) Cu wetting layer, which renders the thin Ag layers (~5 nm thick) continuous and smooth. It was also observed that the optical absorption edges of the multilayer structures increase as the energy band-gaps of the top/bottom oxide layers increase and the multilayer structures with the energy band-gap of ~6.0 eV can be obtained by employing the ZnMgBeO layers, with an excellent resistivity of ~1.7×10-4 Ω.cm. These results represent a significant improvement over the previous reports and the first report on the design and fabrication of the highly conducting transparent materials for the UV-C application.
Keywords: ZnO, ZnMgBeO, multilayer structure, transparent conductive oxide, ultraviolet
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1. Introduction Development of deep ultraviolet (UV) light sources are attracting much attention in recent years, because they have a wide range of potential applications, such as sterilization, water purification, medicine and high density optical recording.1-3 The UV-C light emitting diodes (LED’s) operating at a short wavelength region (
