Low step density High step density Low product yield High

Page 1. Cover Art (a) (b) 5 nm 45 nm 40 nm 5 nm Low step density High step density Low product yield High product yield HCOOH HCOOH...
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Cover Art

Low (a)

step density

Low product yield HCOOH 45 nm

5 nm

High (b)

step density

High product yield HCOOH 5 nm

40 nm