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Nanostructured Ultrafast Silicon-Tip Optical Field-Emitter Arrays Michael E. Swanwick,† Phillip D. Keathley,‡ Arya Fallahi,§ Peter R. Krogen,‡ Guillaume Laurent,‡ Jeffrey Moses,‡ Franz X. Kar̈ tner,‡,§,⊥ and Luis F. Velásquez-García*,† †
Microsystems Technology Laboratories and ‡Department of Electrical Engineering and Computer Science and Research Laboratory of Electronics, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States § Center for Free-Electron Laser Science, Deutsches Elektronen-Synchrotron, Notkestralse 85, 22607 Hamburg, Germany ⊥ Department of Physics and The Hamburg Centre for Ultrafast Imaging, University of Hamburg, Luruper Chaussee 149, 22761 Hamburg, Germany S Supporting Information *
ABSTRACT: Femtosecond ultrabright electron sources with spatially structured emission are an enabling technology for free-electron lasers, compact coherent X-ray sources, electron diffractive imaging, and attosecond science. In this work, we report the design, modeling, fabrication, and experimental characterization of a novel ultrafast optical field emission cathode comprised of a large (>100 000 tips), dense (4.6 million tips·cm−2), and highly uniform (
