Replication of Vertical Features Smaller than 2 nm by Soft Lithography

Replication of Vertical Features Smaller than 2 nm by Soft Lithography

Byron D. Gates, and George M. Whitesides* .... h-PDMS will reproduce low-aspect ratio structures with vertical topography having features â¥1 nm. ... and NIH, and used the MRSEC Shared Facilities supported by the NSF under Award No.


the ability to replicate smaller features using a poly(dimethylsi- ... (dimethylsiloxane) (h-PDMS) layer in contact with the PMMA surface.8,9 The .... the center.


Nov 12, 2003 - This communication demonstrates a simple, soft lithographic approach to the replication and metrology of nanoscale vertical displacements. We patterned test structures with regular patterns that minimize artifacts in measurements by at

Molds for Soft Lithography

Select a Journal or Book, Acc. Chem. .... View: PDF | PDF w/ Links | Full Text HTML .... SPR Imaging Measurements of 1-D and 2-D DNA Microarrays Created from .... An inkjet printing soft photomask and its application on organic polymer substrates ...

Molds for Soft Lithography

This paper describes a practical method for the fabrication of photomasks, masters, and stamps/molds used in soft lithography that minimizes the need for specialized equip- ment. In this method, CAD files are first printed onto paper using an office

Sub-10 nm Nanoimprint Lithography by Wafer Bowing - Nano Letters

Oct 7, 2008 -

Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography

Jason J. Blackstock, William F. Stickle, Carrie L. Donley, Duncan R. Stewart, and R. Stanley Williams. The Journal of Physical Chemistry C 2007 111 (1), 16-20.

Generation of Periodic Enzyme Patterns by Soft Lithography and

Micropatterns of the enzymes glucose oxidase (GOx) and horseradish ... The patterns have been analyzed by noncontact scanning force microscopy. .... Enzymes' action on materials: Recent trends ..... Published online 2 November 2002.

Polymer Microparticles Fabricated by Soft Lithography - Chemistry of

Nov 10, 2005 - Synopsis. Two techniques using soft lithography and lift-off techniques for the fabrication of polymer microparticles are demonstrated. The techniques involve using microstamping of polymer structures onto a sacrificial layer for relea

Polymer Microparticles Fabricated by Soft Lithography - Chemistry of

Two techniques using soft lithography and lift-off techniques for the fabrication ... from the rest of the film, we call the technique microContact Hot Printing (Î¼CHP).

Replication of Vertical Features Smaller than 2 nm by Soft Lithography

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