Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with

Jul 19, 2017 - Semiconductor integrated circuit chip industries have been striving to introduce porous ultralow-k (ULK) dielectrics into the multileve...
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Surface-Localized Sealing of Porous Ultralow‑k Dielectric Films with Ultrathin (40%, dielectric constant (k)