Article pubs.acs.org/Langmuir
Template-Stripped, Ultraflat Gold Surfaces with Coplanar, Embedded Titanium Micropatterns Nagaiyanallur V. Venkataraman,† Jia Pei,† Clément V. M. Cremmel,† Antonella Rossi,†,‡ and Nicholas D. Spencer*,† †
Laboratory for Surface Science and Technology, Department of Materials, ETH Zurich, Wolfgang-Pauli-Strasse 10, CH-8093 Zurich, Switzerland ‡ Dipartimento di Scienze Chimiche e Geologiche, Università degli Studi di Cagliari, Cittadella Universitaria di Monserrato, I-09100 Cagliari, Italy S Supporting Information *
ABSTRACT: Ultraflat gold surfaces with coplanar, embedded titanium micropatterns, exhibiting extremely low roughness over the entire surface, have been obtained by a modified template-stripping procedure. Titanium is deposited onto photolithographically predefined regions of a silicon template. Following photoresist liftoff, the entire surface is backfilled with gold, template stripping is conducted, and an ultraflat micropatterned surface is revealed. Atomic force microscopy confirms a roughness of
