Letter pubs.acs.org/NanoLett
The Smallest Resonator Arrays in Atmosphere by Chip-Size-Grown Nanowires with Tunable Q‑factor and Frequency for Subnanometer Thickness Detection Chengming Jiang,† Chaolong Tang,† and Jinhui Song*,†,‡ †
Department of Metallurgical and Materials Engineering, Center for Materials for Information Technology (MINT), The University of Alabama, Tuscaloosa, Alabama 35487, United States ‡ Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China S Supporting Information *
ABSTRACT: A chip-size vertically aligned nanowire (NW) resonator arrays (VNRs) device has been fabricated with simple one-step lithography process by using grown self-assembled zinc oxide (ZnO) NW arrays. VNR has cantilever diameter of 50 nm, which breakthroughs smallest resonator record (>100 nm) functioning in atmosphere. A new atomic displacement sensing method by using atomic force microscopy is developed to effectively identify the resonance of NW resonator with diameter 50 nm in atmosphere. Sizeeffect and half-dimensional properties of the NW resonator have been systematically studied. Additionally, VNR has been demonstrated with the ability of detecting nanofilm thickness with subnanometer (
