Transparent and Flexible Triboelectric Sensing Array for Touch

Jul 24, 2017 - Transparent and Flexible Triboelectric Sensing Array for Touch Security Applications. Zuqing Yuan†§⊥ , Tao ... and Zhong Lin Wangâ...
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Transparent and Flexible Triboelectric Sensing Array for Touch Security Applications Zuqing Yuan, Tao Zhou, Yingying Yin, Ran Cao, Congju Li, and Zhong Lin Wang ACS Nano, Just Accepted Manuscript • DOI: 10.1021/acsnano.7b03680 • Publication Date (Web): 24 Jul 2017 Downloaded from http://pubs.acs.org on July 26, 2017

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Transparent and Flexible Triboelectric Sensing Array for Touch Security Applications Zuqing Yuan,a,c,



Tao Zhou,a,



Yingying Yin,a,c Ran Cao,a,c Congju Li*,a and Zhong

Lin Wang*,a,b a Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, National Center for Nanoscience and Technology (NCNST), Beijing 100083, China b School of Material Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United State c University of Chinese Academy of Sciences, Beijing 100049, China Email: [email protected] , [email protected]

⊥These authors contribute equally to this work.

ABSTRACT

Tactile sensor with large-scale array and high sensitivity is essential for human-machine interaction, smart wearable devices and mobile network. Here, a transparent and flexible triboelectric sensing array (TSA) with fingertip-sized pixels is demonstrated by integrating ITO electrodes, FEP film and signal-transmission circuits on an undivided palm-sized PET substrate. The sensing pixels can be triggered by the corresponding external contact to induce the electrostatic potential in the transparent electrodes without power consumption, which is individually recognized by the 1 ACS Paragon Plus Environment

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sensor. By testing the response of the pixels, the electrical characterization is systematically investigated. The proposed TSA exhibits excellent durability, independence and synchronicity, which is able to realize real-time touch sensing, spatial mapping and motion monitoring. The integrated TSA has great potential in active tactile system, human-machine interface, wearable electronics, private communication and advanced security identification.

KEYWORDS transparent and flexible, triboelectric nanogenerator, tactile sensor, spatial mapping, motion monitoring

Rapid development of mobile network and smart terminals has inspired the exploration of intelligent sensor technology for the increasing demand on human-machine interaction, artificial intelligence and wearable electronics.1-3 In the field of smart devices, great concern has been focused on the research of tactile sensors with high performance, such as cell phones, intelligent watches and health monitors.4-10 At present, significant breakthrough has been made for large-scale touch sensing array with high-sensitivity and high-resolution, based on various physical mechanism including piezoelectricity,11-14 piezoresistivity15,16 and capacitance.17-20 However, among the special characteristics, the wide range sensitivity, response time, portable convenience and conformance and multifunction have become hot topics to 2 ACS Paragon Plus Environment

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evaluate the practicability of a sensor.21-23 It is easy to see that manufacturing electrical sensing array on an intact transparent substrate with high sensitivity and flexibility is still urgently needed.

Recently, the triboelectric nanogenerator (TENG) has been developed for available solutions to the difficulty of the traditional sensor technique and application.24,25 The triboelectric charges can induce electrostatic potential or current driven by usual mechanical relative motion, which serves as the analogue signals of the sensors. Hence, TENG is ideally suited for self-powered sensing system,26,27 which have been succesfully applied to biomedical system,28-30 track monitoring,31-34 microfluidic assay,35,36 and transparent interface37,38 for its low cost and simple mechanism to convert mechanical energy to electric signals without power consumption. But present findings are unable to completely meet the practical requirement, especially on the handiness, fashion, independence and convenience for the touch screen or security applications.

This paper demonstrates a transparent and flexible triboelectric sensing array (TSA) for spatial mapping and trajectory monitoring with concise structure, high pressure sensitivity and excellent durability, which has potential in large-scale production. The self-powered TSA consists of a transparent PET substrate, an elastic adhering PDMS layer and an electrification layer of FEP film, which is based on the single-electrode triboelectric nanogenerator.39,40 A 5×5 TSA with each ITO pixel of 1×1 cm2 was fabricated to spatially map multiple touch stimuli. The ITO layers were connected by 3 ACS Paragon Plus Environment

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the conductive holes, which served as induced electrodes and transmission circuits at the same time, and established a compact multi-channel sensing system on a transparent and flexible film. Owing to the elastic PDMS layer and surface functionalization of the FEP film, the self-powered sensor is able to achieve a sensitivity of 2.79 mV/Pa in low pressure region, a limit of detection