Tunable Lattice Plasmon Resonances in 1D Nanogratings - ACS

Jan 25, 2019 - We tailored line shape and wavelength of line-SLRs by varying the resonance wavelength of individual gold lines and the grating diffrac...
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Tunable Lattice Plasmon Resonances in 1D Nanogratings Yi Hua, Ahmad K. Fumani, and Teri W. Odom ACS Photonics, Just Accepted Manuscript • DOI: 10.1021/acsphotonics.8b01541 • Publication Date (Web): 25 Jan 2019 Downloaded from http://pubs.acs.org on January 25, 2019

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Tunable Lattice Plasmon Resonances in 1D Nanogratings Yi Hua,†,⸹ Ahmad K. Fumani,‡ ,⸹ and Teri W. Odom†,‡,* †Department

of Materials Science and Engineering and ‡Department of Chemistry, Northwestern University, Evanston, Illinois, 60208, United States

⸹Both

authors contributed equally to this manuscript

*Correspondence

to: [email protected]

Abstract Lattice plasmon resonances or surface lattice resonances (SLRs) supported in two-dimensional (2D) metal nanoparticle arrays have extremely narrow linewidths and highly localized electric field enhancements, which are key properties for realizing plasmon lasers and hybrid solid-state lighting devices. This paper reports lattice plasmons in one-dimensional (1D) metal nanogratings with broadband tunability (over 400 nm) far beyond their 2D counterparts at visible wavelengths. The large wavelength tunabilities of 1D or line-SLRs are from the lower symmetry of the structures compared to 2D arrays based on nanoparticles. We demonstrate that line-SLRs exhibit Fano-like character based on coupling between an out-of-plane plasmon excitation and 1D Bragg diffraction modes. We show how the height and periodicity of the grating determines the spectral properties of the line-SLRS. By adjusting the line height, we achieved high-quality lattice resonances even in index-mismatched environments.

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Keywords Lattice plasmon resonance, surface lattice resonance, out-of-plane charge oscillations, nanograting, Fano resonance

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Exploiting the collective behavior of 2D nanoparticle arrays can result in plasmonic resonances hundreds of times narrower than the localized surface plasmons (LSPs) of individual particles.1-4 Diffractive coupling between neighboring particles at the lattice resonance suppresses the radiative loss and produces orders of magnitude larger localized electric fields compared to single particles. High-quality surface lattice resonances (SLRs) from particle arrays have enabled nanoscale lasing and nonlinear optical phenomena, including higher-order harmonic generation.5-8 SLR resonance characteristics are determined by the particle and lattice geometry and are fixed at the time of fabrication. One method to vary SLR wavelength reversibly is to embed nanoparticle arrays in a stretchable matrix and to mechanically change the particle spacing.9, 10 High-quality surface lattice resonances from 2D particle arrays require stringent structural and refractive-index conditions.11 SLRs support the narrowest resonance linewidth at the optical band edge, and their dispersive behavior shows lower quality resonances at off-normal incident angles.9 Asymmetric dielectric environments inhibit long-range coupling between particles and suppress lattice resonances.12 With the appropriate particle size13 and lattice constant,14 SLRs can be excited in asymmetric environments but with relatively poor quality.11 In 2D arrays, particle dimensions determine whether the type of LSP coupled to the diffraction mode is dipolar or quadrupolar and whether the excitation is in-plane or out-of-plane.15-19 Moreover, the interplay between in-plane and out-of-plane charge oscillations can result in hybridized excitations with reduced net dipole moments on the nanoparticles.10, 16, 20 Manipulating the geometry of plasmonic unit cells is a simple yet effective means to take advantage of different charge oscillation types in designing a desired SLR response. Here we show that 1D gold nanogratings can support narrow line-SLRs that are tunable over a wide spectral range. Unlike 2D arrays, 1D nanogratings can maintain high-quality lattice modes

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from visible to near-infrared wavelengths (580 nm to 1000 nm) by changing the azimuthal and incident angles. We tailored lineshape and wavelength of line-SLRs by varying the resonance wavelength of individual gold lines and the grating diffraction mode. In addition, we achieved line-SLR resonances in non-uniform refractive index environments by adjusting grating height. Figure 1a depicts 1D gold nanogratings that can be fabricated using the soft nanofabrication procedure PEEL (photolithography, etching, electron-beam deposition, and lift-off) over cm2-

Figure 1. One-dimensional nanograting exhibits a continuously tunable Fano-shaped resonance under TM polarized excitation. (a) SEM image of 400 nm period 1D Au nanogratings on Si template. The inset shows a schematic diagram of the nanogratings and the optical measurement. (b) depicts the transmittance spectra of Au nanograting with 𝑎0 = 400 nm and h = 100 nm at ϕ = 0° at different incident angles. The spectra are shifted vertically for clear demonstration. areas.21 First, a grating pattern was formed in photoresist (Shipley 1805) on a silicon (100) wafer by soft interference lithography using a poly(dimethylsiloxane) (PDMS) mask.21 After deposition of chromium (8 nm) and lift-off of the photoresist layer, deep reactive ion etching (DRIE) was used to create trenches with steep sidewalls (depth > 200 nm) in the silicon substrate. The plasmon 4 ACS Paragon Plus Environment

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gratings were then produced by thermal deposition of gold (up to 200 nm) on the template and removing the chromium sacrificial layer by chemical etching. Finally, the nanogratings were stripped from the silicon template using a layer of UV-curable polyurethane and transferred to a glass substrate (Supporting Information, Methods). Figure 1b shows how the transmission spectrum of a nanograting (h = 100 nm and 𝑎0 = 400 nm) evolves with incident angle θ and azimuthal angle ϕ = 0° in a uniform refractive index (𝑛 = 1.52). Under transverse magnetic (TM) polarized light, a narrow dispersive feature emerged at 698 nm around θ = 10° with 3.7 nm full width at half maximum. The resonance red-shifted and narrowed at increased θ. The electric field component of the TM-polarized light perpendicular to the nanograting excited out-of-plane charge oscillations on the gold lines. Since the perpendicular component was negligible, no resonance was observed at small incident angles (𝜃 < 10°). The lineshape of the line-SLR was prominent in reflection spectra (Figure S1) and arose from Fano interference between the single-line plasmon and diffraction mode of the grating. Under transverse electric (TE) polarized light, when the electric field is parallel to the line direction, the sharp resonance disappeared. TE-polarized light did not couple to single-line plasmons, and hence lineSLRs were not excited (Figure S2). The wavelength and lineshape of line-SLRs were determined by the spectral position of the Bragg diffraction mode and the single-line plasmon. Although the resonant wavelength of the single-line plasmon wavelength is fixed by width and height of the lines, the effective diffraction wavelength, and therefore line-SLRs, can be tuned by changing the incident angle θ. Additionally, since 1D gratings have lower symmetry compared to 2D arrays, changing the azimuthal angle provides a second parameter to tune the SLR. For example, the same grating structure generated plasmonic resonances over different wavelength ranges at azimuthal angles ϕ = 45° and 90°

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(Figure 2). At ϕ = 45°, the blue-shift in the resonance over the same θ range was smaller compared to ϕ = 0° (Figure 2a). In contrast, at ϕ = 90°, the resonance red-shifted and the linewidth broadened

Figure 2. Dispersive property of the out-of-plane lattice plasmon at two different azimuthal angles. (a) and (b) depict the transmittance spectra of Au nanograting with h = 100 nm and 𝑎0 = 400 nm at different incident angles for ϕ = 45° and ϕ = 90° respectively. (c) and (d) show the simulated electric field vectors in the x-z plane corresponding to resonances at θ = 40° for the azimuthal angle ϕ = 45° and 90° respectively. as θ increased (Figure 2b). Notably, by tuning the azimuthal angle, the resonance wavelength could be tuned over 400 nm for a given incident angle. Finite-difference, time-domain (FDTD) simulations were in excellent agreement (Figures S3-4). Figures 2c-d illustrate that the electric dipole was in the z-direction, which confirms the out-of-plane nature of the charge oscillations at two different resonances (θ = 40°, ϕ = 45° and 90°). To explore Fano interference between line-plasmons and different diffractive modes, we varied the period of the gratings. Figures 3a-b show how changing 𝑎0 while keeping the line dimensions constant (w = 80 nm and h = 100 nm) influences the line-lattice resonance. Periodicities 𝑎0= 400, 485, and 570 nm were selected to shift the diffraction mode relative to the single-line plasmon 6 ACS Paragon Plus Environment

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wavelength. Increasing the periodicity shifted the (±1,0) diffraction modes to longer wavelengths, and SLRs appeared as narrow dark features on the lower energy side of the photonic mode. The

Figure 3. The dispersion property of the lattice resonance can be tuned by controlling the diffraction mode. (a) and (b) show the dispersion diagram of nanograting with 𝑎0 = 400, 485, and 570 nm in transmission for azimuthal angle ϕ = 0° and 90°. The grey scale depicts the transmission intensity and the dashed lines show different diffraction modes. diffraction lines were labeled with two order numbers (𝑛𝑥,𝑛𝑦) to differentiate the cases with ϕ = 0° and 90°. To determine the energy of the line plasmon, we carried out FDTD simulations of the optical response of a single gold line (Figure S7). The extinction spectrum for a line with h = 100 nm and w = 80 nm had a resonance at 2.2 eV; increasing the height shifted the line-plasmon to lower energies. Line-SLRs vanished when the out-of-plane dipolar oscillations in individual gold lines could not be excited at k// = 0 since the incident light does not have out-of-plane electric field components.

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As grating periodicity increased (Figure 3), line-SLRs approached photonic modes (dashed white lines). This response was more noticeable when ϕ = 90° (Figure 3b) and results from the change in coupling between the line-plasmon and diffraction mode. At the largest periodicity 𝑎0 = 570 nm, at ϕ = 0°, the interaction between the (-1,0) diffraction mode and the line-plasmon was too weak to form a lattice resonance; however, the (-2,0) mode was located closer to the lineplasmon and could generate a line-SLR. To access lattice modes in a non-uniform index environment, we studied how changing the superstrate and the height of the lines affected the line-SLR. When n of the superstrate decreased relative to the PU substrate, the lattice resonance disappeared (Figure 4a). Decreasing n blueshifted the line-plasmon, but the diffraction mode dominated by the PU layer did not change. Due to this blue-shift, the single-line plasmon could no longer couple to the diffraction mode, and the line-SLR vanished. To excite lattice plasmons in a mismatched refractive index environment, we tuned the energy of the line plasmon by increasing the height of the lines (Figure 4b). Increasing h to 200 nm decreased the line plasmon energy, and the line-SLR reappeared along the (-1,0)

Figure 4. Lattice plasmon resonance excited in nonuniform dielectric environments. (a) Dispersion diagram for nanogratings with 𝑎0 = 400 nm and h = 100 nm with water n = 1.33 superstrate. The lattice resonance is absent. (b) and (c) Dispersion diagrams for a nanograting with 𝑎0 = 400 nm and h = 200 nm with water n = 1.33 and index-matching oil n = 1.52 superstrates, respectively. The line-SLR follows the (-1,0) diffraction mode.

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diffraction mode. Increasing the superstrate n to match the substrate shifted the line-SLR to lower energies (Figure 4c). Compared to the structure with h = 100 nm (Figure 3a), the resonance in index-matched 200-nm tall gratings occurred at lower energies with a larger separation from the diffraction mode. We observed about 50-nm shift in the resonance wavelength by changing the refractive index from n = 1.52 to 1.33. Line-SLRs are distinct from surface plasmon polaritons (SPPs) supported in 1D gratings that are usually considered analogues of 2D nanohole arrays.22-25 Although SLRs and SPPs share some similar properties, including strong angle-dependent optical responses (Supporting Information), there are a few key differences: (1) SLRs correspond to reduced transmission, and SPPs lead to enhanced transmission.26 (2) SLRs result from Fano interference between a single-line plasmon and Bragg diffraction, and therefore an appropriate grating height is needed to observe SLRs. SPPs are confined to the surface and do not require minimum grating height for excitation. (3) SLRs in 1D nanogratings disappear at k// = 0 because the out-of-plane dipolar oscillations cannot be excited by the incident electric field. In contrast, SPPs can be excited at k// = 0 because electron oscillations of SPPs are along the surface of the grating. (4) Asymmetric dielectric environments suppress the quality of SLRs. SPPs are confined to metal-dielectric interfaces, and if the indices of superstrate and substrate were different, the SPP resonance would only shift in wavelength. As grating width increases, however, 1D nanogratings will approach the structure of nanoslit arrays.27 We increased the grating width w = 80 nm to w = 320 nm (𝑎0 = 400 nm fixed) (Figure S8) and found that SPPs and SLRs can both be excited (Figure S9). FDTD simulations demonstrated that SPPs are more prominent on gratings with large enough widths (Figure S10). Thus, 1D nanogratings can function as an intermediate structure between 2D nanohole arrays that support SPPs and 2D particle arrays that can show SLRs.

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In summary, we realized line-SLRs from 1D metallic nanogratings that can be excited in nonuniform dielectric environments. The lower symmetry of 1D gratings compared to 2D nanoparticle arrays allowed line-SLRs to be tuned via changing the azimuthal angle. Also, we showed that the lineshape and quality factor of the lattice resonances were determined by Fano interference between the line-plasmon and different diffraction modes. The geometry of 1D nanogratings along with their unique tunable spectral properties make them suitable for interfacing photoluminescent materials for light emission modification and plasmon lasing. Also, a line-SLRs can be potentially used for modifying the light wavefront and beam steering. ASSOCIATED CONTENT Supporting information. Methods. Transmission and reflection spectra of gold 1D nanograting arrays under TE-polarized excitation. FDTD simulated transmission and reflection spectra of 1D gold nanograting arrays (h = 100 nm) under TM polarized light at ϕ = 0°. FDTD simulated transmission spectra of 1D gold nanograting arrays (h = 100 nm) under TM polarized light at ϕ = 45° and ϕ = 90°. This material is available free of charge via the Internet at http://pubs.acs.org. ACKNOWLEDGMENTS This work was supported by the Vannevar Bush Faculty Fellowship from DOD under grant No. N00014-17-1-3023. This work used Northwestern University Micro/Nano Fabrication Facility (NUFAB), which is partially supported by Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205), the Materials Research Science and Engineering Center (DMR-1720139), the State of Illinois, and Northwestern University. This research was supported in part through the computational resources and staff contributions provided for the Quest high performance computing facility at Northwestern University which is jointly supported 10 ACS Paragon Plus Environment

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by the Office of the Provost, the Office for Research, and Northwestern University Information Technology. The authors are thankful to Jingtian Hu for thoughtful suggestions on the manuscript.

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REFERENCES 1. Zou, S.; Schatz, G. C. Narrow plasmonic/photonic extinction and scattering line shapes for one and two dimensional silver nanoparticle arrays. The Journal of Chemical Physics 2004, 121, 12606-12612. 2. Hicks, E. M.; Zou, S.; Schatz, G. C.; Spears, K. G.; Van Duyne, R. P.; Gunnarsson, L.; Rindzevicius, T.; Kasemo, B.; Käll, M. Controlling Plasmon Line Shapes through Diffractive Coupling in Linear Arrays of Cylindrical Nanoparticles Fabricated by Electron Beam Lithography. Nano Letters 2005, 5, 1065-1070. 3. Wang, W.; Ramezani, M.; Väkeväinen, A. I.; Törmä, P.; Rivas, J. G.; Odom, T. W. The rich photonic world of plasmonic nanoparticle arrays. Materials Today 2018, 21, 303-314. 4. Kravets, V. G.; Kabashin, A. V.; Barnes, W. L.; Grigorenko, A. N. Plasmonic Surface Lattice Resonances: A Review of Properties and Applications. Chemical Reviews 2018, 118, 59125951. 5. Hakala, T. K.; Rekola, H. T.; Väkeväinen, A. I.; Martikainen, J. P.; Nečada, M.; Moilanen, A. J.; Törmä, P. Lasing in dark and bright modes of a finite-sized plasmonic lattice. Nature Communications 2017, 8, 13687. 6. Zakharko, Y.; Graf, A.; Zaumseil, J. Plasmonic Crystals for Strong Light–Matter Coupling in Carbon Nanotubes. Nano Letters 2016, 16, 6504-6510. 7. Michaeli, L.; Keren-Zur, S.; Avayu, O.; Suchowski, H.; Ellenbogen, T. Nonlinear Surface Lattice Resonance in Plasmonic Nanoparticle Arrays. Physical Review Letters 2017, 118, 243904. 8. Wang, D.; Yang, A.; Wang, W.; Hua, Y.; Schaller, R. D.; Schatz, G. C.; Odom, T. W. Band-edge engineering for controlled multi-modal nanolasing in plasmonic superlattices. Nature Nanotechnology 2017, 12, 889. 9. Yang, A.; Hryn, A. J.; Bourgeois, M. R.; Lee, W.-K.; Hu, J.; Schatz, G. C.; Odom, T. W. Programmable and reversible plasmon mode engineering. Proceedings of the National Academy of Sciences 2016, 113, 14201-14206. 10. Wang, D.; Bourgeois, M. R.; Lee, W.-K.; Li, R.; Trivedi, D.; Knudson, M. P.; Wang, W.; Schatz, G. C.; Odom, T. W. Stretchable Nanolasing from Hybrid Quadrupole Plasmons. Nano Letters 2018, 18, 4549-4555. 11. Wang, D.; Wang, W.; Knudson, M. P.; Schatz, G. C.; Odom, T. W. Structural Engineering in Plasmon Nanolasers. Chemical Reviews 2017. 12. Auguié, B.; Bendaña, X. M.; Barnes, W. L.; García de Abajo, F. J. Diffractive arrays of gold nanoparticles near an interface: Critical role of the substrate. Phys Rev B 2010, 82, 155447. 13. Kravets, V. G.; Schedin, F.; Grigorenko, A. N. Extremely Narrow Plasmon Resonances Based on Diffraction Coupling of Localized Plasmons in Arrays of Metallic Nanoparticles. Phys Rev Lett 2008, 101, 087403. 14. Offermans, P.; Schaafsma, M. C.; Rodriguez, S. R. K.; Zhang, Y.; Crego-Calama, M.; Brongersma, S. H.; Gómez Rivas, J. Universal Scaling of the Figure of Merit of Plasmonic Sensors. Acs Nano 2011, 5, 5151-5157. 15. Zhou, W.; Odom, T. W. Tunable subradiant lattice plasmons by out-of-plane dipolar interactions. Nat Nano 2011, 6, 423-427. 16. Huttunen, M. J.; Dolgaleva, K.; Törmä, P.; Boyd, R. W. Ultra-strong polarization dependence of surface lattice resonances with out-of-plane plasmon oscillations. Opt. Express 2016, 24, 28279-28289. 12 ACS Paragon Plus Environment

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17. Sakai, K.; Nomura, K.; Yamamoto, T.; Omura, T.; Sasaki, K. Quadrupole lattice resonances in plasmonic crystal excited by cylindrical vector beams. Scientific Reports 2016, 6, 34967. 18. Luk'yanchuk, B.; Zheludev, N. I.; Maier, S. A.; Halas, N. J.; Nordlander, P.; Giessen, H.; Chong, C. T. The Fano resonance in plasmonic nanostructures and metamaterials. Nature Materials 2010, 9, 707. 19. Rodriguez, S. R. K.; Abass, A.; Maes, B.; Janssen, O. T. A.; Vecchi, G.; Gómez Rivas, J. Coupling Bright and Dark Plasmonic Lattice Resonances. Physical Review X 2011, 1, 021019. 20. Sonnefraud, Y.; Verellen, N.; Sobhani, H.; Vandenbosch, G. A. E.; Moshchalkov, V. V.; Van Dorpe, P.; Nordlander, P.; Maier, S. A. Experimental Realization of Subradiant, Superradiant, and Fano Resonances in Ring/Disk Plasmonic Nanocavities. ACS Nano 2010, 4, 1664-1670. 21. Henzie, J.; Lee, M. H.; Odom, T. W. Multiscale patterning of plasmonic metamaterials. Nature Nanotechnology 2007, 2, 549-554. 22. Pang, Y.; Genet, C.; Ebbesen, T. W. Optical transmission through subwavelength slit apertures in metallic films. Opt Commun 2007, 280, 10-15. 23. Porto, J. A.; García-Vidal, F. J.; Pendry, J. B. Transmission Resonances on Metallic Gratings with Very Narrow Slits. Physical Review Letters 1999, 83, 2845-2848. 24. Lee, K. G.; Park, Q. H. Coupling of Surface Plasmon Polaritons and Light in Metallic Nanoslits. Physical Review Letters 2005, 95, 103902. 25. Thackray, B. D.; Thomas, P. A.; Auton, G. H.; Rodriguez, F. J.; Marshall, O. P.; Kravets, V. G.; Grigorenko, A. N. Super-Narrow, Extremely High Quality Collective Plasmon Resonances at Telecom Wavelengths and Their Application in a Hybrid Graphene-Plasmonic Modulator. Nano Letters 2015, 15, 3519-3523. 26. Schröter, U.; Heitmann, D. Surface-plasmon-enhanced transmission through metallic gratings. Physical Review B 1998, 58, 15419-15421. 27. Hua, Y. Manipulating Far-field Optical Responses in Plasmonic Nanostructures (Doctoral dissertation). Available from ProQuest Dissertations & Theses Global database. (Accession Order No. AAT 3741366), 2015.

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