Visible-Frequency Dielectric Metasurfaces for Multiwavelength

Subscriber access provided by University of Glasgow Library

Communication

Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly-dispersive holograms Bo Wang, Fengliang Dong, Qi-Tong Li, Dong Yang, Chengwei Sun, Jianjun Chen, Zhiwei Song, Lihua Xu, Weiguo Chu, Yun-Feng Xiao, Qihuang Gong, and Yan Li Nano Lett., Just Accepted Manuscript • DOI: 10.1021/acs.nanolett.6b02326 • Publication Date (Web): 11 Jul 2016 Downloaded from http://pubs.acs.org on July 12, 2016

Just Accepted “Just Accepted” manuscripts have been peer-reviewed and accepted for publication. They are posted online prior to technical editing, formatting for publication and author proofing. The American Chemical Society provides “Just Accepted” as a free service to the research community to expedite the dissemination of scientific material as soon as possible after acceptance. “Just Accepted” manuscripts appear in full in PDF format accompanied by an HTML abstract. “Just Accepted” manuscripts have been fully peer reviewed, but should not be considered the official version of record. They are accessible to all readers and citable by the Digital Object Identifier (DOI®). “Just Accepted” is an optional service offered to authors. Therefore, the “Just Accepted” Web site may not include all articles that will be published in the journal. After a manuscript is technically edited and formatted, it will be removed from the “Just Accepted” Web site and published as an ASAP article. Note that technical editing may introduce minor changes to the manuscript text and/or graphics which could affect content, and all legal disclaimers and ethical guidelines that apply to the journal pertain. ACS cannot be held responsible for errors or consequences arising from the use of information contained in these “Just Accepted” manuscripts.

Nano Letters is published by the American Chemical Society. 1155 Sixteenth Street N.W., Washington, DC 20036 Published by American Chemical Society. Copyright © American Chemical Society. However, no copyright claim is made to original U.S. Government works, or works produced by employees of any Commonwealth realm Crown government in the course of their duties.

Page 1 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

Visible-frequency dielectric metasurfaces for multi-wavelength achromatic and highly-dispersive holograms Bo Wang †，‡, Fengliang Dong‖,‡, Qi-Tong Li †, Dong Yang†, Chengwei Sun†, Jianjun Chen†,⊥, Zhiwei Song‖, Lihua Xu‖, Weiguo Chu‖,*, Yun-Feng Xiao ,⊥, Qihuang Gong ,⊥, and Yan Li ,⊥,* †

†

†

†

State Key Laboratory for Mesoscopic Physics, Department of Physics, Peking University and Collaborative Innovation Center of Quantum Matter, Beijing 100871, China. ‖CAS

Center for Excellence in Nanoscience, National Center for Nanoscience and Technology,

Beijing 100190, China. ⊥Collaborative

Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi

030006, China

ABSTRACT: Dielectric metasurfaces built up with nano-structures of high refractive index represent a powerful platform for highly efficient flat optical devices, due to their easy-tuning electromagnetic scattering properties and relatively high transmission efficiencies. Here we show visible-frequency silicon metasurfaces formed by three kinds of nano-blocks multiplexed in a subwavelength unit to constitute a meta-molecule, which are capable of wavefront manipulation for red, green and blue light simultaneously. Full phase control is achieved for each wavelength by independently changing the in-plane orientations of the corresponding nano-blocks to induce the required geometric phases. Achromatic and highly-dispersive meta-holograms are fabricated to demonstrate the wavefront manipulation with high resolution. This technique could be viable for various practical holographic applications and flat achromatic devices.

1 ACS Paragon Plus Environment

Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 2 of 14

KEYWORDS: dielectric metasurface, color hologram, visible, multi-wavelength, achromatic hologram, highly-dispersive hologram.

Recently, much attention has been paid to shaping light spectrally with metasurfaces, which is vital for various practical applications [1-11]. Operation of metasurfaces at multi-wavelengths without dispersion normally requires a meta-molecule comprising multiple or geometrically complex meta-atoms. Manipulating the phases at dual wavelengths [6] and three primary colors [3] was realized by plasmonic metasurfaces consisting of nanostructures with different surface plasmon resonances. Several works generated independent wavefronts at two wavelengths with different polarizations by utilizing the polarization and wavelength selectivities of metal nanostructures [5, 7, 8]. To date, all the metal metasurfaces operating at two or three wavelengths show the low diffraction efficiency and inevitable twin diffraction in the transmission mode because of only two-level phase or amplitude distributions across the surface. Alternatively, dielectric metasurfaces built up of high-refractive-index nanostructures can achieve relatively high transmission efficiency with full phase range (0~2π) control [10-29]. To realize achromatic devices, two or more Si nano-resonators are coupled to control the phases by changing the dimensions and/or spacing of resonators. Achromatic lenses were realized by aperiodic array of coupled Si nano-resonators for three discrete telecommunication wavelengths [1, 2], or by meta-molecules constructed with four Si nano-posts for two infrared wavelengths [11]. The M-level phase control at N discrete wavelengths normally requires M×N types of resonators. When M increases, the resonator dimension differences decrease, which increases the fabrication difficulty, especially for shorter wavelengths. However, the resonator types can be sharply reduced to N when the phase is manipulated via the Pancharatnam–Berry (PB) phase by varying the in-plane orientations instead of the sizes of nano-structures [12, 15, 20, 30-36]. A three-color meta-hologram was theoretically studied [9] but the Si nano-structures were separated in four microscale segmented areas according to three colors, making it hard to extend to the fabrication of achromatic lenses. Here, we proposed and realized dielectric metasurfaces built up of Si nano-blocks with only three sizes multiplexed with subwavelength spacing to manipulate the phases for red, green and blue wavelengths. Full phase control is easily achieved for each wavelength by changing the in-


Page 3 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

plane orientations of the corresponding nano-blocks to serve as narrow-band half-wave plates for non-overlapping discrete wavelengths with high conversion efficiencies in the transmission mode for the circularly polarized incident beam. The strong confinement of light within these Si nano-blocks basically avoids their interactions in each unit so that the phase for each color can be manipulated almost independently, as demonstrated by two kinds of specially designed color holograms: the achromatic meta-hologram generating identical images for all three wavelengths, and the highly-dispersive meta-hologram projecting distinct images at specific wavelengths. Both holograms verified the successful quasi-continual control of the phases for three visible wavelengths across the surface with a subwavelength resolution. This technique has the potential for applications that require the independent wavefront manipulation at different wavelengths by simply changing the orientation distributions of nano-blocks in each unit. Furthermore, it can be scalable to other frequencies with similar fabrication processes. The metasurface proposed here is composed of subwavelength units arranged in square pixels. We begin with the local phase change based on a single Si nano-block on the fused silica substrate with the in-plane orientation ϕ as illustrated in Figure 1a. Note that the nano-block has different dimensions along x and y directions and thus the phase can be locally changed by choosing different in-plane orientations of the nano-block. When a circularly polarized light beam is normally incident from the side of silica, the transmitted light is generally composed of two parts: one with the same handedness as the incident light with no phase delay, and the other with the opposite handedness with a phase delay of ±2ϕ, with ± depending on the handedness of the incident beam, as shown in Figure 1b. This geometrically induced PB phase is wavelength independent, but the conversion efficiency (defined as percentage of the transmitted light that converted its polarization) strongly relies on the resonant properties of the unit structures, which can be tuned by their shapes and dimensions. The scattering efficiencies (defined as the ratio of the scattering cross-section to the geometrical cross-section of the nano-block) of one example unit for both polarizations along x and y directions are calculated in the wavelength range between 400nm and 800nm.While calculating the scattering efficiencies of one pixel of a metasurface, we adopt infinite periodic array of such identical pixels as a good approximation [22, 25]. As illustrated in Figure 1c, spectra are strongly polarization dependent: The peak of for x polarization is around 670 nm while that for y polarization is around 600 nm. Near the resonant wavelengths, the strong light-matter interaction usually gives rise to an abrupt phase 3 ACS Paragon Plus Environment

Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 4 of 14

change. Calculations indicated that the relative phase for x and y polarization for the transmitted light, ( ), is approximate to π within the wavelength region between two peaks, but rapidly drops to nearly zero beyond this region. Therefore, one Si nano-block unit can work effectively as a narrow band half-wave plate with the fast-axis changing with its in-plane orientation. Figure 1e gives the conversion efficiency of nearly 100% in this half-wave plate condition region for a circularly polarized incident beam. The diffraction efficiency of this structure, the percentage of energy transferred by the geometric phase with respect to the incident beam, depend not only on the conversion efficiency but also on the transmittance. As shown in Figure 1e, the transmittance of the designed structure between 570 nm and 670 nm are around 50%. The energy losses are due to the back scattering and the absorption.

Figure 1．． Illustration of one unit of the rotational Si nano-block structure and its scattering and PB phase manipulation. (a) One-pixel unit structure. Two sets of coordinate systems and their correlations are shown. The X-Y is associated with the lattice periods and the x-y is imbedded with the length and the width of the nano-blocks in the plane of substrate surface. Their common axis Z is perpendicular to the plane of surface and pointing from the side of silica to air. The angle between x and X axis is defined as ϕ. The pixels are arranged with period P = 370 nm. The height of nano-block is h= 320 nm, length is lx=145 nm and width is ly = 105nm. The refractive of silica is 1.46. (b) Phase delays as a function of ϕ, the handedness impacts the plus-minus sign of the phase. (c) The numerical result of Q s of the nano-block for φ=0 (d) The relative phase delay of the transmitted light in the far field, for x and y polarizations, respectively. (e) The calculated transmittance (dashed line) and the conversion efficiency (solid line).


Page 5 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

The efficiency spectra change with the Si block dimensions. Intuitively, particles of smaller sizes would undergo a blue-shift of resonant peaks, while particles of larger sizes would undergo a red-shift [27, 38]. Therefore, simply changing the dimensions of Si nano-blocks can tune the resonances as well as the efficiency peaks. We selected three Si nano-blocks with different dimensions along x and y and the same thickness along z which are marked as SR, SG and SB, respectively. Top views of three nano-blocks, along with their dimensions are presented in Figure 2a, with false colors in red, green and blue. The calculated diffraction efficiency spectra for individual SR, SG and SB in the range from 400 to 800 nm are displayed in Figure 2b. Their resonance peaks are near three wavelengths available in our experiment: 633 nm (R), 532 nm (G) and 473 nm (B). Therefore, only one kind of nano-block is predominantly activated to induce the geometric PB phase for one wavelength upon being illuminated by three wavelengths simultaneously. Consequently, we multiplex SR, SG and SB into a subwavelength unit to construct a meta-molecule that provides multichannel full phase manipulations at R, G and B. In each unit, the in-plane orientations of SR, SG and SB control the phase at R, G and B respectively. Because the absorption of silicon increases with the decrease of the visible wavelength as shown in Figure S1, the efficiency of SB at B is smaller than that of SG at G and much smaller than that of SR at R. Therefore, two SBs are arranged in each meta-molecule in order to enhance the efficiency for B (the corresponding diffraction efficiency increases from the blue solid curve to the blue dashed curve in Figure 2b) [3]. Figure 2b also presents the calculated diffraction efficiencies of SR, SG and SB at the three wavelengths of interest, while all the four nano-blocks simultaneously exist in the meta-molecules. It is clearly verified that cross-talks between different channels are weak at the three wavelengths since the light energy is highly confined within the silicon nano-blocks. The diffraction efficiencies of SR at R, SG at G and SB at B are 19%, 5.7% and 6.4%, respectively. The decrease of the efficiencies from those of the individual nano-blocks are mainly caused by the increased absorption and reflection with the number of nano-blocks in one meta-molecule.


Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 6 of 14

Figure 2. Illustration of the meta-molecule. (a) Three Si nano-blocks with distinct x- and y-dimensions (lx and ly) marked as SR, SG and SB, but with the same height h=320 nm. (b) Simulated spectra of diffraction efficiency of an array composed of the individual nano-block with period of 420nm in the wavelength range of 400nm to 800nm. The blue dashed curve presents the diffraction efficiency of SB for a denser distribution with period 420/√2nm. The red circles, green cubes and blue triangles present the diffraction efficiencies of SR, SG and SB at R, G and B, respectively, when all the four nano-blocks exist in one meta-molecule. (c) One meta-molecule consisting of multiplexed Si nano-blocks to form the metasurface. The dimension of the pixel is 420nm420nm.

The multi-visible wavelength phase manipulation using this metasurface is manifested by two kinds of specially designed holograms. The achromatic meta-hologram is to generate identical target images at the R, G and B, like the achromatic lens focusing light of different wavelengths to the same focal plane, and the highly-dispersive meta-hologram is to project distinct images at R, G and B. The basic ideas are illustrated in Figure 3a and Figure 3b. The light phases after the metasurface for different wavelengths are manipulated independently. Using the GerchbergSaxton (GS) algorithm, the required phase distributions are retrieved and then converted into the in-plane orientations of the corresponding nano-blocks. The metasurfaces are composed of 452×452 meta-molecules whose dimension is 420nm×420nm. Note that the scattering property of the structure is insensitive to the lattice period, and pixels of other dimensions can also be applied. For each kind of nano-block, the number of discrete phase level is 8, with a rotation step of 22.5 degree. Finer steps can also be used for better performance. Partial SEM images of the holograms are presented in the insets of Figure 3a and Figure 3b. Experimental setup for hologram characterization is shown in Figure 3c. Three lasers are combined and circularly polarized before they illuminate the sample. To avoid overlapping between the target image and the background, the off-axis setup is adopted here, and the screen is inclined accordingly to project an undistorted picture to be captured by a visible camera.


Page 7 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

Figure 3. Achromatic and highly-dispersive meta-holograms and experimental setup for characterization. (a) The achromatic meta-hologram generates the same image (a flower) for all R (633nm), G (532nm) and B (473nm) colors in the far field. (b) The highly-dispersive meta-hologram independently projects distinct R, G and B images: a flower, a peduncle and a pot. Insets in (a) and (b): Partial SEM of the fabricated metasurfaces. Scale bar, 1μm. (c) Experimental setup for the meta-hologram characterization. As are attenuators. After combination of three lasers, the beam passes through a Glan-Prism (P), an achromatic quarter-wave plate working from 400-800nm λ/4 , generating a circularly polarized beam to focus onto the hologram (H) by a lens (L). The off-axis setup is adopted here to avoid overlapping between the target image and the background. The far field image is projected to a screen inclined by an angle of 22.5° to reduce the distortion of image that is captured by a visible camera.

The reconstructed images by the achromatic meta-hologram illuminated by three available lasers (R at 633nm, G at 532nm and B at 473nm) are shown in Figure 4 with Figure 4a being the target image as a reference. Figure 4b to Figure 4d present reconstructed images of the first kind of the holograms illuminated by only R, G and B, respectively. Unlike the holograms designed for a single wavelength in which images of different sizes and positions are obtained for different wavelengths due to chromatic aberration [10,30,31,32,37], this hologram generates images with identical size and position for the three wavelengths as expected. In addition, full color image


Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 8 of 14

can be created by balancing the relative input powers of R, G and B. For instance, the combination of R, G and B enables to generate flower of white (Figure 4e), as well as yellow (R and G, Figure 4 f), cyan (G and B, Figure 4g) and purple(R and B, Figure 4h).

Figure 4. Experimental results of the achromatic color hologram. (a) The target image, a flower. (b)-(h) Reconstructed images of the meta-hologram illuminated by (b)R only, (c) G only, (d) B only. The combination of R, G and B enables to generate flower of (e) white (R, G and B), as well as (f) yellow (R and G), (g) cyan (G and B) and (h) purple(R and B).

The reconstructed images of the highly-dispersive color hologram are given in Figure 5. When three lasers are combined to illuminate the meta-hologram, a colorful image containing three independent monochromic parts is reconstructed as shown in Figure 5a: a red flower, a green peduncle and a blue pot. The individual part with distinct color appears at different locations if only one laser is used, as shown in Figure 5b to Figure 5d. The results clearly demonstrate the three almost independent channels formed by the three nano-blocks. The phase of each designed wavelength after the metasurface is determined only by the in-plane orientation of the corresponding nano-blocks. The design of quasi-continual phase manipulation across the surface at each wavelength effectively avoids the dual-images that inevitably occur when using two-level phase encoding metasurfaces. However, conjugate images will appear if the incident beams are not circularly polarized. For the linear polarization, the conjugate images have the same intensity as the main images. Weak undesired images for both holograms appear sometimes. For instance, the dim undesired orders around the green flower in Figure 4c and the blue peduncle in Figure 5c are observed. One possible reason is the fabrication error. Since SG and SB are around 100 nm,


Page 9 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

small size fluctuations would possibly cause the sharp change of efficiency spectra. The measured efficiencies of the reconstructed images for the highly-dispersive color hologram are 18% at R, 5.2% at G and 3.6% at B, which agree well with the simulated diffraction efficiencies shown in Figure 2b. The results are an order of magnitude higher than those of the previously demonstrated color holograms [3] and further improvement is expected by using other dielectric materials with smaller absorptivity [39].

Figure 5. Experimental results of the highly-dispersive color hologram. The reconstructed images of the meta-hologram illuminated with (a) R, G and B, (b) only R, (c) only G, (d) only B.

In summary, we have proposed and implemented dielectric metasurfaces capable of manipulating the phases at red, green and blue wavelengths. The meta-molecule consists of three kinds of Si nano-blocks, each providing a channel for a specific wavelength to independently manipulate the corresponding phase by setting the in-plane orientations of each nano-block with fine phase step achievable within fabrication latitude. The experimental results of two kinds of meta-holograms agree well with the designs. This type of metasurface can find numerous applications where spectral wavefront manipulation is required such as achromatic lenses and holograms. Although the metasurfaces demonstrated here are fabricated with silicon for the visible light, this technique can be extended to other frequencies using high index materials with smaller absorptivity [39].


Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 10 of 14

ASSOCIATED CONTENT Supporting Information. The supporting information is available free of charge via the Internet at http://pubs.acs.org. Process of sample fabrication. Numerical methods of simulations. Design of meta-molecule and interactions between nano-blocks. The full far field images generated by the color hologram. AUTHOR INFORMATION Corresponding Author *Email: [email protected]; [email protected]. Author Contributions B.W., F.D. and Y.L. conceived the idea; B.W. performed the designs, simulations, and measurements; F.D., Z.S., L.X. and W.C. fabricated the metasurfaces and assisted in design; Q.L. performed the measurements and analysis; D.Y assisted in design; C.S assisted in measurements; J.C., Y.X, Q.G advised on the optical setup and the interpretation of the data; W.C. and Y.L. supervised the analysis, experiments and edited the manuscript. All authors discussed the results and implications and commented on the manuscript at all stages. ‡ These authors contributed equally to this work. Notes The authors declare no competing financial interests.

ACKNOWLEDGMENT This work was supported by the National Basic Research Program of China under Grant No. 2013CB921904, the National Natural Science Foundation of China under Grant Nos. 11474010 and 61590933, the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry under Grant No. Y5691I11GJ, and Youth Innovation Promotion Association CAS under Grant No. Y5442912ZX.


Page 11 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

REFERENCES [1] Aieta, F.; Kats; M.A.; Genevet, P.; Capasso, F. Science. 2015, 347, 1342-1345. [2] Khorasaninejad, M.; Aieta, F.; Kanhaiya, P; Kats, M. A.; Genevet, P.; Rousso, D.; Capasso. F. Nano Lett. 2015, 15, 5358−5362. [3] Huang, Y.; Chen, W. T.; Tsai, W.; Wu, P. C; Wang, C.; Sun, G.; Tsai, D. P. Nano Lett. 2015, 15, 3122-3127. [4] Choudhury, S.M.; Shaltout, A.; Shalaev, V.M.; Boltasseva, A.; Kildishev, A.V. CLEO,2015, JTu5A.89. [5] Eisenbach, O.; Avayu, O.; Ditcovski R.; Ellenbogen, T. Opt. Exp. 2015, 23, 3928-3936. [6] Montelongo, Y.; Tenorio-Pearl, J. O.; Williams, C.; Zhang, S.; Milne, W. I.; Wilkinson, T. D. Proc. Natl Acad. Sci. USA., 2014, 111, 12679–12683. [7] Montelongo, Y.; Tenorio-Pearl, J.O.; Milne, W. I.; Wilkinson, T. D. Nano Lett. 2014, 14, 294-298. [8] Walther, B.; Helgert, C.; Rockstuhl, C.; Setzpfandt, F.; Eilenberger, F.; Kley, E.; Lederer, F.; Tünnermann, A.; Pertsch. T. Adv. Mater. 2012, 24, 6300-6304. [9] Zhao, W.; Liu, B.; Jiang, H.; Song, J.; Pei, Y.; Jiang. Y. Opt. Lett. 2016, 41, 147-150. [10] Khorasaninejad, M.; Ambrosio, A.; Kanhaiya, P.; Capasso, F. Sci. Adv. 2016, 2, e1501258. [11] Arbabi, E.; Arbabi, A.; Kamali, S. M.; Horie, Y.; Faraon, A. axiv.org, 2016, 1601.05847v1. [12] Hasman, E.; Kleiner, V.; Biener, G.; Niv, A. Appl. Phys. Lett. 2003, 82, 328-330. [13] Arbabi, A.; Horie, Y.; Ball, A. J.; Bagheri, M.; Faraon, A. Nature. Commun. 2015, 6, 7069. [14] Fattal, D.; Li, J.; Peng, Z.; Fiorentino, M.; Beausoleil, R. G. Nature Photon. 2010, 4, 466– 470.


Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Page 12 of 14

[15] Lin, D.; Fan, P.; Hasman, E; Brongersma, M. L. Science, 2014, 345, 298–302. [16] Staude, I.; Miroshnichenko, A. E.; Decker, M.; Fofang, N. T.; Liu, S.; Gonzales, E.; Dominguez, J.; Luk, T. S.; Neshev, D. N.; Brener, I.; Kivshar, Y. ACS Nano, 2013, 7 , 7824– 7832. [17] Yang, Y.; Wang, W.; Moitra, P.; Kravchenko, I. I.; Briggs, D. P.; Valentine , J. Nano Lett. 2014, 14, 1394−1399. [18] Shalaev, M. I.; Sun, J.; Tsukernik, A.; Pandey, A.; Nikolskiy, K.; Litchinitser, N.M. Nano Lett. 2015, 15, 6261-6266. [19] Chong, K. E.; Staude, I.; James, A.; Dominguez, J.; Liu, S.; Campione, S.; Subramania, G. S.; Luk, T. S.; Decker, M.; Neshev, D. N.; Brener, I.; Kivshar, Y.S. Nano Lett. 2015, 15, 5369– 5374. [20] Desiatov, B.; Mazurski, N.; Fainman, Y.; Levy, U. Opt. Exp. 2015, 23, 22611-22618. [21] Vo, S.; Fattal, D.; Sorin, W. V.; Peng, Z.; Tran, T.; Fiorentino, M.; Beausoleil, R. G. IEEE Photon. Technol. Lett. 2014, 26, 1375–1378. [22] Arbabi, A.; Horie, Y.; Bagheri, M.; Faraon, A. Nature Nano. 2015, 10, 937–943. [23] Yu, Y. F.; Zhu, A. Y.; Paniagua-Domínguez, R.; Fu, Y. H.; Luk’yanchuk, B.; Kuznetsov. A. I. Laser &Photonics Rev. 2015, 9, 412-418. [24] Decker, M.; Staude, I.; Falkner, M.; Dominguez, J.; Neshev, D. N.; Brener, I.; Pertsch , T.; Kivshar, Y. S. Adv. Optical Mater. 2015, 3, 813-820. [25] Evlyukhin, A. B.; Reinhardt, C.; Seidel, A.; Luk’yanchuk, B. S.; Chichkov, B. N. Phys. Rev. B, 2010, 82, 045404. [26] Paniagua-Domínguez1, R.; Yu, Y. F.; Miroshnichenko, A. E.; Krivitsky, L. A.; Fu, Y. H.; Valuckas,V.; Gonzaga, L.; Toh, Y. T.; Kay, A. Y. S.; Luk’yanchuk, B.; Kuznetsov. A. I. Nature.Commun. 2016, 7, 10362. 12 ACS Paragon Plus Environment

Page 13 of 14

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60

Nano Letters

[27] Ee, H.; Kang, J.; Brongersma, M. L.; Seo, M. Nano Lett. 2015, 15, 1759-1765. [28] Jahani, S.; Jacob, Z. All-dielectric metamaterials, Nature Nano. 2016, 11, 23-36. [29] Khorasaninejad, M.; Capasso, F. Nano Lett. 2015, 15, 6709−6715. [30] Zheng, G.; Mühlenbernd, H.; Kenney, M.; Li, G.; Zentgraf, T.; Zhang. S. Nature Nano. 2015, 10, 308–312. [31] Huang, L.; Chen, X.; Mühlenbernd, H.; Zhang, H.; Chen, S.; Bai, B.; Tan, Q.; Jin, G.; Cheah, K.; Qiu, C.; Li, J.; Zentgraf, T.; Zhang. S. Nature Commun. 2013, 4, 2808. [32] Wen, D.; Yue, F.; Li, G.; Zheng, G.; Chan, K.; Chen, S.; Chen, M.; Li, K. F.; Wong, P. W. H.; Cheah, K. W. Pun, E.Y. B.; Zhang, S.; Chen, X. Nature. Commun. 2015, 6, 8241. [33] Maguid, E.; Yulevich, I.; Veksler, D.; Kleiner, V.; Brongersma, M. L.; Hasman, E. Science, 2016, 352, 1202-1206. [34] Huang, K.; Dong, Z.; Mei, S.; Zhang, L.; Liu, Y.; Liu, H.; Zhu, H.; Teng, J.; Luk'yanchuk, B.; Yang, J. K.W.; Qiu, C. Laser& Photonics Rev. 2016, 10, 500-509. [35] Bomzon, Z.; Biener, G.; Kleiner, V.; Hasman, E. Opt. Lett. 2002, 27, 1141-1143. [36] Bomzon, Z.; Kleiner, V.; Hasman, E. Opt. Lett. 2001, 26, 1424-1426. [37] Chen, W. T. ; Yang, K.; Wang, C.; Huang, Y.; Sun, G.; Chiang, I.; Liao, C. Y.; Hsu, W.; Lin, H. T.; Sun, S.; Zhou, L.;Liu, A. Q.; Tsai, D. P. Nano Lett. 2014, 14, 225−230. [38] Cao, L.; Fan, P.; Barnard, E. S.; Brown, A. M.; Brongersma. M. L., Nano Lett. 2010, 10, 2649–2654. [39] Khorasaninejad, M.; Chen, W. T.; Devlin, R. C.; Oh, J.; Zhu, A. Y.; Capasso, F. Science, 2016, 352, 1190-1194.


Nano Letters

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

ACS Paragon Plus Environment

Page 14 of 14

Visible-Frequency Dielectric Metasurfaces for Multiwavelength

Recommend Documents