Electronic and Photonic Applications of Polymers ... - ACS Publications

Electronic and Photonic Applications of Polymers Downloaded from pubs.acs.org by MONASH UNIV on 02/24/16. For personal use only.

Electronic and Photonic Applications of Polymers


ADVANCES

IN

CHEMISTRY

SERIES


Electronic and Photonic Applications of Polymers Murrae J. Bowden, EDITOR Bell Communications Research

S. Richard Turner, EDITOR Eastman Kodak Company

Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California September 7-12, 1986

American Chemical Society, Washington, DC 1988

218


Library of Congress Cataloging-in-Publication Data

Electronic and photonic applications of polymers Murrae J. Bowden, editor, S. Richard Turner, editor, p. cm.—(Advances in chemistry series; 218) "Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September 7-12, 1986." Bibliography: p. Includes index. ISBN 0-8412-1400-X 1. Polymers and polymerization—Congresses. 2. Photoresists—Congresses. 3. Microlithography—Materials—Congresses. I. Bowden, M . J., 1943. II. Turner, S. Richard, 1942. III. American Chemical Society. Division of Polymeric Materials: Science and Engineering. IV. American Chemical Society. Meeting (192nd: 1986: Anaheim, Calif.) V. Series. QD1.A355 no. 218 [TK7871.15.P6] 540 s—dc19 [621.381]

88-21099 CIP

Copyright © 1988 American Chemical Society All Rights Reserved. The appearance of the code at the bottom of the first page of each chapter in this volume indicates the copyright owner's consent that reprographic copies of the chapter may be made for personal or internal use or for the personal or internal use of specific clients. This consent is given on the condition, however, that the copier pay the stated per copy fee through the Copyright Clearance Center, Inc., 27 Congress Stret, Salem, MA 01970, for copying beyond that permitted by Sections 107 or 108 of the U.S. Copyright Law. This consent does not extend to copying or transmission by any means—graphic or electronic—for any other purpose, such as for general distribution, for advertising or promotional purposes, for creating a new collective work, for resale, or for information storage and retrieval systems. The copying fee for each chapter is indicated in the code at the bottom of the first page of the chapter. The citation of trade names and/or names of manufacturers in this publication is not to be construed as an endorsement or as approval by ACS of the commercial products or services referenced herein; nor should the mere reference herein to any drawing, specification, chemical process, or other data be regarded as a license or as a conveyance of any right or permission, to the holder, reader, or any other person or corporation, to manufacture, reproduce, use, or sell any patented invention or copyrighted work that may in any way be related thereto. Registered names, trademarks, etc., used in this publication, even without specific indication thereof, are not to be considered unprotected by law. PRINTED IN T H E UNITED STATES OF AMERICA


Advances in Chemistry Series M . Joan Comstock, Series Editor 1988 ACS Books Advisory Board Paul S. Anderson

Merck Sharp & D o h m e Research Laboratories

Harvey W. Blanch University of California—Berkeley

Malcolm H. Chisholm

Indiana University

Alan Elzerman

Clemson University

John W. Finley

Nabisco Brands, Inc.

Natalie Foster

Lehigh University

Marye Anne Fox The University of Texas—Austin

Roland F. Hirsch U.S. Department of Energy

G. Wayne Ivie U S D A , Agricultural Research Service

Michael R. Ladisch

Purdue University

Vincent D. McGinniss

Battelle Columbus Laboratories

Daniel M. Quinn University of Iowa

James C. Randall

Exxon Chemical C o m p a n y

E. Reichmanis

A T & T Bell Laboratories

C. M. Roland U.S. N a v a l Research Laboratory

W. D. Shults Oak Ridge National Laboratory

Geoffrey K. Smith R o h m & Haas C o .

Douglas B. Walters

National Institute of Environmental Health

Wendy A. Warr

Imperial Chemical Industries


FOREWORD The A D V A N C E S I N C H E M I S T R Y S E R I E S was founded in 1949 by the American Chemical Society as an outlet for symposia and collections of data in special areas of topical interest that could not be accommodated in the Society's journals. It provides a medium for symposia that would otherwise be fragmented because their papers would be distributed among several journals or not published at all. Papers are reviewed critically according to ACS editorial standards and receive the careful attention and processing characteristic of ACS publications. Volumes in the A D V A N C E S I N C H E M I S T R Y S E R I E S maintain the integrity of the symposia on which they are based; however, verbatim reproductions of previously published papers are not accepted. Papers may include reports of research as well as reviews, because symposia may embrace both types of presentation.

A B O U T THE E D I T O R S


M U R R A E J . B O W D E N obtained his P h . D . from

the U n i v e r s i t y o f Q u e e n s l a n d , A u s t r a l i a , i n 1969, a n d after a 2-year postdoctoral a p p o i n t m e n t at the U n i v e r s i t y of M a n c h e s t e r , E n g l a n d , h e j o i n e d B e l l T e l e p h o n e Laboratories i n the U n i t e d States as a M e m b e r o f T e c h n i c a l Staff i n O c t o b e r 1971. I n 1979, h e was p r o m o t e d to S u p e r v i s o r o f the R a d i a t i o n Sensitive Materials and Applications group within the Organic Materials Chemical Engineering D e partment. W i t h the d i v e s t i t u r e o f A T & T at t h e b e g i n n i n g o f 1984, h e j o i n e d B e l l C o m m u n i cations Research w h e r e h e is c u r r e n t l y D i v i sion M a n a g e r o f the C h e m i s t r y a n d M a t e r i a l s Science Research D i v i s i o n . H i s research interests have b e e n p r i m a r i l y i n t h e effects o f h i g h - e n e r g y radiation o n p o l y m e r i c materials, p a r t i c u l a r l y i n the application to h i g h resolution l i t h o g r a p h y for m i c r o c i r c u i t manufacture. H e is author o r coauthor of o v e r 80 t e c h n i c a l publications a n d holds 8 patents. H e is a m e m b e r o f the A m e r i c a n C h e m i c a l Society a n d was a past p r e s i d e n t of the A C S D i v i s i o n of P o l y m e r i c M a t e r i a l s : Science a n d E n g i n e e r i n g . S. R I C H A R D T U R N E R r e c e i v e d his P h . D . i n o r -

g a n i c - p o l y m e r c h e m i s t r y from t h e U n i v e r s i t y of F l o r i d a i n 1971 a n d d i d a year of postdoctoral w o r k at the Institute of M a c r o m o l e c u l a r C h e m istry i n D a r m s t a d t , F e d e r a l R e p u b l i c o f G e r many. Before j o i n i n g the Kodak Research Laboratories i n 1980, he w o r k e d i n t h e X e r o x Research Laboratories i n W e b s t e r , N e w Y o r k , a n d the E x x o n C o r p o r a t e Research L a b o r a t o ries i n L i n d e n , N e w Jersey. H e is c u r r e n t l y a Research Associate i n the P o l y m e r Science Laboratories at K o d a k . H i s research interests i n c l u d e synthesis a n d properties of photoactive p o l y m e r s , i o n - c o n t a i n i n g p o l y m e r s , a n d water-soluble p o l y m e r s . H e has o v e r 80 publications a n d patents i n these areas. H e is a m e m b e r o f the executive c o m m i t t e e o f the D i v i s i o n o f P o l y m e r i c M a t e r i a l s : Science a n d E n g i n e e r i n g of the A m e r i c a n C h e m i c a l Society, w h e r e h e c u r r e n t l y serves as P r o g r a m Chairman. vii

Electronic and Photonic Applications of Polymers ... - ACS Publications

Recommend Documents