Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with

Jul 19, 2017 - The deposited polymer was highly localized at the top surface of the porous film and dense sealing of the surface pore was achieved by ...
1 downloads 12 Views 3MB Size
Surface-Localized Sealing of Porous Ultralow‑k Dielectric Films with Ultrathin (40%, dielectric constant (k)