Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with

Jul 19, 2017 - The deposited polymer was highly localized at the top surface of the porous film and dense sealing of the surface pore was achieved by ...
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Surface-Localized Sealing of Porous Ultralow‑k Dielectric Films with Ultrathin (40%, dielectric constant (k)